********* ** . ** ********* *********************************** ** . Starting Step 4.1 - ANOVA ** *********************************** ********* ** . ** ********* *************************************** ** anova width cassette wafer site ** *************************************** ********************************** ********************************** ** 3-WAY ANALYSIS OF VARIANCE ** ********************************** ********************************** NUMBER OF OBSERVATIONS = 450 NUMBER OF FACTORS = 3 NUMBER OF LEVELS FOR FACTOR 1 = 30 NUMBER OF LEVELS FOR FACTOR 2 = 3 NUMBER OF LEVELS FOR FACTOR 3 = 5 BALANCED CASE RESIDUAL STANDARD DEVIATION = 0.31663063169E+00 RESIDUAL DEGREES OF FREEDOM = 414 NO REPLICATION CASE NUMBER OF DISTINCT CELLS = 450 ***************** * ANOVA TABLE * ***************** SOURCE DF SUM OF SQUARES MEAN SQUARE F STATISTIC F CDF SIG ------------------------------------------------------------------------------- TOTAL (CORRECTED) 449 216.102463 0.481297 ------------------------------------------------------------------------------- FACTOR 1 29 127.402939 4.393205 43.8203 100.000% ** FACTOR 2 2 0.024030 0.012015 0.1198 11.291% FACTOR 3 4 47.170033 11.792508 117.6252 100.000% ** ------------------------------------------------------------------------------- RESIDUAL 414 41.505550 0.100255 RESIDUAL STANDARD DEVIATION = 0.31663063169 RESIDUAL DEGREES OF FREEDOM = 414 **************** * ESTIMATION * **************** GRAND MEAN = 0.25322859287E+01 GRAND STANDARD DEVIATION = 0.69375592470E+00 LEVEL-ID NI MEAN EFFECT SD(EFFECT) -------------------------------------------------------------------- FACTOR 1-- 1.00000 15. 2.27211 -0.26018 0.08038 -- 2.00000 15. 2.11809 -0.41420 0.08038 -- 3.00000 15. 1.73718 -0.79511 0.08038 -- 4.00000 15. 2.43620 -0.09609 0.08038 -- 5.00000 15. 3.02107 0.48878 0.08038 -- 6.00000 15. 2.58258 0.05030 0.08038 -- 7.00000 15. 2.32278 -0.20950 0.08038 -- 8.00000 15. 1.77805 -0.75423 0.08038 -- 9.00000 15. 1.78352 -0.74876 0.08038 -- 10.00000 15. 2.29378 -0.23851 0.08038 -- 11.00000 15. 2.67611 0.14382 0.08038 -- 12.00000 15. 1.81208 -0.72021 0.08038 -- 13.00000 15. 2.73389 0.20160 0.08038 -- 14.00000 15. 2.96785 0.43557 0.08038 -- 15.00000 15. 1.82981 -0.70247 0.08038 -- 16.00000 15. 2.44628 -0.08601 0.08038 -- 17.00000 15. 2.27987 -0.25242 0.08038 -- 18.00000 15. 2.38946 -0.14283 0.08038 -- 19.00000 15. 3.42731 0.89503 0.08038 -- 20.00000 15. 2.38192 -0.15037 0.08038 -- 21.00000 15. 1.97614 -0.55614 0.08038 -- 22.00000 15. 2.49634 -0.03595 0.08038 -- 23.00000 15. 2.94686 0.41458 0.08038 -- 24.00000 15. 2.97240 0.44011 0.08038 -- 25.00000 15. 2.61122 0.07893 0.08038 -- 26.00000 15. 2.83658 0.30430 0.08038 -- 27.00000 15. 4.15395 1.62166 0.08038 -- 28.00000 15. 3.19525 0.66297 0.08038 -- 29.00000 15. 2.62664 0.09435 0.08038 -- 30.00000 15. 2.86321 0.33092 0.08038 FACTOR 2-- 1.00000 150. 2.52199 -0.01029 0.02111 -- 2.00000 150. 2.53664 0.00435 0.02111 -- 3.00000 150. 2.53823 0.00594 0.02111 FACTOR 3-- 1.00000 90. 3.05438 0.52209 0.02985 -- 2.00000 90. 2.54388 0.01160 0.02985 -- 3.00000 90. 2.03143 -0.50086 0.02985 -- 4.00000 90. 2.51568 -0.01660 0.02985 -- 5.00000 90. 2.51605 -0.01624 0.02985 MODEL RESIDUAL STANDARD DEVIATION ------------------------------------------------------- CONSTANT ONLY-- 0.6937559247 CONSTANT & FACTOR 1 ONLY-- 0.4595534205 CONSTANT & FACTOR 2 ONLY-- 0.6952673793 CONSTANT & FACTOR 3 ONLY-- 0.6161360145 CONSTANT & ALL 3 FACTORS -- 0.3166306317 FACTOR DF, SUM OF SQUARES, MEAN SQUARE, F STAT, F CDF WRITTEN TO FILE DPST1F.DAT FACTOR-ID, LEVEL-ID, NI, MEAN, EFFECT, SD(EFFECT) WRITTEN TO FILE DPST2F.DAT ************************************************* ** . Finished Step 4.1: Page Back for Output ** ************************************************* ********************** ** END OF CAPTURE ** **********************