| Bibliographic Citation | |
| Full Text |  718 K |
|---|---|
| Title | Photon statistics, film preparation and characterization in fluorescent microthermal imaging |
| Creator/Author | Tangyunyong, Paiboon ; Barton, D.L. |
| Publication Date | 1995 Aug 01 |
| OSTI Identifier | OSTI ID: 100055; Legacy ID: DE95016098 |
| Report Number(s) | SAND--95-1670C; CONF-951156--2 |
| DOE Contract Number | AC04-94AL85000 |
| Other Number(s) | Other: ON: DE95016098 |
| Resource Type | Conference |
| Resource Relation | Conference: ISTFA `95: 21. international symposium for testing and failure analysis, Santa Clara, CA (United States), 5-10 Nov 1995; Other Information: PBD: [1995] |
| Research Org | Sandia National Labs., Albuquerque, NM (United States) |
| Sponsoring Org | USDOE, Washington, DC (United States) |
| Subject | 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES;44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; INTEGRATED CIRCUITS; THERMOGRAPHY; IMAGES; ULTRAVIOLET RADIATION; FLUORESCENCE |
| Description/Abstract | Fluorescent microthermal imaging (FMI) involves coating a sample surface with a thin inorganic-based film that, upon exposure to uv light, emits temperature-dependent fluorescence. FMI offers the ability to create thermal maps of integrated circuits with a thermal resolution theoretically limited to 1 m{degree}C and a spatial resolution diffraction-limited to 0.3 {mu}m. Even though FMI has been in use for more than a decade, many factors that can affect the thermal image quality have not been studied well. This paper presents recent results showing the limitations from photon shot noise and the improvement in signal-to-noise ratio from signal averaging. Three important factors in film preparation and characterization are presented that have a significant impact on thermal quality and sensitivity of FMI: uv bleaching, film dilution, and film curing. It is shown how proper film preparation and data collection method can dramatically improve the quality of FMI thermal images. |
| Country of Publication | United States |
| Language | English |
| Format | Medium: P; Size: 6 p. |
| Availability | OSTI as DE95016098 To purchase this media from NTIS, click here |
| System Entry Date | 2008 Feb 04 |
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Last Updated: 03/16/2009