| Found 78 publications. (Click on Title to view Citation) |
| Authors in
order (Authors underlined are NIST Authors) |
Document type |
Available format |
Pub ID |
Date published |
|
Modeling and Analysis of Scatterometry Signatures for Optical Critical Dimension Reference Material Applications |
|
Patrick, Heather ; Germer, Thomas Avery; Cresswell, Michael W.; Allen, Richard A; Dixson, Ronald G; Bishop, Michael R; |
Proceedings
|
None |
841085 |
To Appear in |
 |
|
Comparison of Measurement Techniques for Linewidth Metrology on Advanced Photomasks |
|
Smith, Stewart ;Tsiamis, Andreas ;McCallum, Martin ;Hourd, Andrew ;Stevenson, J ;Walton, Anthony ;Dixson, Ronald G; Allen, Richard A; Potzick, James Edward; Cresswell, Michael W.; Orji, Ndubuisi George; |
Journal
|
 (905 K) |
901862 |
19-FEB-09 |
|
|
Comparison of SEM and HRTEM CD Measurements Extracted from Test-Structures Having Feature Linewidths from 40 nm to 240 nm |
|
Cresswell, Michael W.; Allen, Richard A; Guthrie, William F; Murabito, Christine E; Dixson, Ronald G; Hunt, Amy ; |
Journal
|
(1065 K) |
32240 |
01-JAN-08 |
|
|
Line Width Measurement Technique Using Through-Focus Optical Images |
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Attota, Ravikiran ; Silver, Richard M; Dixson, Ronald G; |
Journal
|
None |
823239 |
01-JAN-08 |
|
|
Nano- and Atomic-Scale Length Metrology |
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Vorburger, Theodore V; Dixson, Ronald G; Fu, Joseph N; Orji, Ndubuisi George; Feng, Shaw C; Cresswell, Michael W.; Allen, Richard A; Guthrie, William F; Chu, Wei ; |
Proceedings
|
None |
824603 |
14-DEC-07 |
|
|
Photomask Applications of Traceable Atomic Force Microscope Dimensional Metrology at NIST |
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Dixson, Ronald G; Orji, Ndubuisi George; Potzick, James Edward; Fu, Joseph N; Cresswell, Michael W.; Allen, Richard A; Smith, S J;Walton, Anthony J; |
Proceedings
|
None |
823242 |
01-OCT-07 |
|
|
CD Reference Materials Fabricated on Monolithic 200 mm Wafers for Automated Metrology Tool Applications |
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Allen, Richard A; Dixson, Ronald G; Cresswell, Michael W.; Gutherie, William ; Shulver, Byron J;Bunting, Andrew S;Stevenson, J. Tom;Walton, Anthony ; |
Proceedings
|
(184 K) |
32654 |
30-SEP-07 |
|
|
Modeling and Analysis of Scatterometry Signatures for Optical Critical Dimension Reference Material Applications |
|
Patrick, Heather ;Germer, Thomas Avery; Cresswell, Michael W.; Allen, Richard A; Dixson, Ronald G; Bishop, Michael ; |
Proceedings
|
(75 K) |
32756 |
30-SEP-07 |
|
|
Leveraging LER to Minimize Linewidth Measurement Uncertainty in a Calibration Exercise |
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Roberts, James ;Banke, W ;Dixson, Ronald G; |
Proceedings
|
None |
823224 |
05-APR-07 |
|
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Single Crystal Critical Dimension Reference Materials (SCCDRM): Process Optimization for the Next Generation of Standards |
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Dixson, Ronald G; Guthrie, William F; Cresswell, Michael W.; Allen, Richard A; Orji, Ndubuisi George; |
Proceedings
|
None |
823219 |
05-APR-07 |
|
|
Comparison and Uncertainties of Standards for CD-AFM Microscope Tip Width Calibration |
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Dixson, Ronald G; Orji, Ndubuisi George; |
Proceedings
|
None |
823230 |
05-APR-07 |
|
|
TEM Calibration Methods for Critical Dimension Standards |
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Orji, Ndubuisi George; Dixson, Ronald G; Bunday, B ;Bishop, M R;Cresswell, Michael W.; Allgair, J ; |
Proceedings
|
None |
823228 |
05-APR-07 |
|
|
Study of Test Structures for Use as Reference Material in Optical Critical Dimension Applications |
|
Allen, Richard A; Patrick, Heather ;Bishop, Michael ;Germer, Thomas Avery; Dixson, Ronald G; Gutherie, William ; Cresswell, Michael W.; |
Proceedings
|
(258 K) |
32593 |
22-MAR-07 |
|
|
Application of Carbon Nanotube Probes in a Critical Dimension Atomic Force Microscope |
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Park, B C. ; Choi, J ;Ahn, S J;Kim, D H;Joon, L ;Dixson, Ronald G; Orji, Ndubuisi George; Fu, Joseph N; Vorburger, Theodore V; |
Proceedings
|
None |
823234 |
01-MAR-07 |
|
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Single Crystal Critical Dimension Reference Materials (SCCDRM): Process Optimization for the Next Generation of Standards |
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Dixson, Ronald G; Gutherie, William ; Cresswell, Michael W.; Allen, Richard A; Orji, Ndubuisi G; |
Proceedings
|
(178 K) |
32753 |
01-MAR-07 |
|
|
TEM Calibration Methods for Critical Dimension Standards |
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Orji, Ndubuisi G; Dixson, Ronald G; Garcia-Gutierrez, Domingo I.;Bunday, Benjamin D.;Bishop, Michael ;Cresswell, Michael W.; Allen, Richard A; Allgair, John A.; |
Proceedings
|
(693 K) |
32755 |
01-MAR-07 |
|
|
Computational Models of the Nana Probe Tip for Static Behaviors (Abstract Only) |
|
Feng, Shaw C; Vorburger, Theodore V; Joung, Che Bong; Fu, Joseph N; Dixson, Ronald G; Ma, Li ; |
Proceedings
|
(69 K) |
822658 |
01-FEB-07 |
|
|
Higher Order Tip Effects in CD-AFM Linewidth Measurements |
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Orji, Ndubuisi George; Dixson, Ronald G; |
Journal
|
None |
823201 |
01-JAN-07 |
|
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Linewidth Measurement Based on Automatically Matched and Stitched Images |
|
Chu, Wei ; Fu, Joseph N; Dixson, Ronald G; Vorburger, Theodore V; |
Proceedings
|
None |
824614 |
01-JAN-07 |
|
|
3D Image Correction of Tilted Sample Through Coordinate Transformation |
|
Chu, Wei ; Fu, Joseph N; Dixson, Ronald G; Vorburger, Theodore V; |
Journal
|
None |
823244 |
01-JAN-07 |
|
|
Optical Critical Dimension Measurement and Illumination Analysis using the Through-focus Focus Metric |
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Attota, Ravikiran ; Silver, Richard M; Bishop, M R;Dixson, Ronald G; |
Proceedings
|
None |
823215 |
24-MAR-06 |
|
|
The Limits of Image-Based Optical Metrology |
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Silver, Richard M; Barnes, Bryan M.; Attota, Ravikiran ; Jun, Jay Shi; Filliben, James J; Soto, Juan ; Stocker, Michael T; Lipscomb, P ;Marx, Egon ; Patrick, Heather ; Dixson, Ronald G; Larrabee, Robert D.; |
Proceedings
|
None |
823206 |
01-MAR-06 |
|
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Progress on Implementation of a CD-AFM Based Reference Measurement System |
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Orji, Ndubuisi George; Martinez, Angela ;Dixson, Ronald G; Allgair, J ; |
Proceedings
|
None |
823197 |
01-MAR-06 |
|
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Traceable Atomic Force Microscope Dimensional Metrology at NIST |
|
Dixson, Ronald G; Orji, Ndubuisi George; Fu, Joseph N; Cresswell, Michael W.; Allen, Richard A; Guthrie, William F; |
Proceedings
|
None |
823204 |
01-MAR-06 |
|
|
Nano- and Atomic-Scale Length Metrology |
|
Vorburger, Theodore V; Dixson, Ronald G; Fu, Joseph N; Orji, Ndubuisi George; Feng, Shaw C; Cresswell, Michael W.; Allen, Richard A; Guthrie, William F; Chu, Wei ; |
Proceedings
|
None |
823216 |
01-JAN-06 |
|
|
Traceable Calibration of Critical-dimension Atomic Force Microscope Linewidth Measurements with Nanometer Uncertainty |
|
Dixson, Ronald G; Allen, Richard A; Guthrie, William F; Cresswell, Michael W.; |
Journal
|
(247 K) |
32210 |
30-NOV-05 |
|
|
The Study of Silicon Stepped Surfaces as Atomic Force Microscope Calib Standards With a Calibrated AFM at NIST |
|
Tsai, V W. ; Vorburger, Theodore V; Dixson, Ronald G; Fu, Joseph N; Koning, R ; Silver, Richard M; Williams, Edwin R; |
Book
|
None |
820918 |
29-SEP-05 |
|
|
Critical Dimension Reference Features with Sub-Five Nanometer Uncertainty |
|
Cresswell, Michael W.; Dixson, Ronald G; Guthrie, William F; Allen, Richard A; Murabito, Christine E; Park, Brandon ; Martinez, Joaquin V; Hunt, Amy ; |
Proceedings
|
None |
31923 |
30-MAY-05 |
|
|
Comparison of SEM and HRTEM CD-Measurements Extracted from Monocrystalline Tes-Structures Having Feature Linewidths from 40 nm to 240 nm |
|
Cresswell, Michael W.; Park, Brandon ; Allen, Richard A; Guthrie, William F; Dixson, Ronald G; Tan, Wei ;Murabito, Christine E; |
Proceedings
|
None |
31907 |
18-APR-05 |
|
|
Comparison of SEM and HRTEM CD-Measurements Extracted From Monocrystalline Tes-Structures Having Feature Linewidths From 40 nm to 240 nm |
|
Tan, W ;Allen, Robert ; Cresswell, Michael W.; Murabito, Christine E; Park, B C. ; Dixson, Ronald G; Guthrie, William F; |
Proceedings
|
None |
822390 |
04-APR-05 |
|
|
Report of Investigation of RM 8111: Single-Crystal Critical Dimension Prototype Reference Materials |
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Cresswell, Michael W.; Allen, Richard A; Dixson, Ronald G; Guthrie, William F; Murabito, Christine E; Park, Brandon ; Martinez, Joaquin V; |
|
None |
31868 |
02-MAR-05 |
|
|
CD-AFM Reference Metrology at NIST and SEMATECH |
|
Dixson, Ronald G; Fu, J ;Orji, Ndubuisi G; Guthrie, William F; Allen, Richard A; Cresswell, Michael W.; |
Proceedings
|
(113 K) |
32108 |
27-FEB-05 |
|
|
Line Edge Roughness Metrology Using Atomic Force Microscopes |
|
Orji, Ndubuisi George; Vorburger, Theodore V; Fu, Joseph N; Dixson, Ronald G; Nguyen, C V;Raja, Jayaraman ; |
Journal
|
None |
823182 |
01-JAN-05 |
|
|
Dimensional Metrology with AFM |
|
Mcwaid, T ;Schneir, J ; Dixson, Ronald G; Tsai, V W. ; |
Proceedings
|
None |
820749 |
01-JAN-05 |
|
|
Linewidth Measurement from a Stitched AFM Image |
|
Fu, Joseph N; Dixson, Ronald G; Orji, Ndubuisi George; Vorburger, Theodore V; Nguyen, C V; |
Proceedings
|
None |
823186 |
01-JAN-05 |
|
|
Reference Measurement System Using Critical Dimension Atomic Force Microscopy (CD-AFM): Final Report |
|
Dixson, Ronald G; |
Other
|
None |
823190 |
01-JAN-05 |
|
|
Traceable Calibration of Critical-Dimension Atomic Force Microscope Linewidth Measurements with Nanometer Uncertainty |
|
Dixson, Ronald G; Allen, Richard A; Guthrie, William F; Cresswell, Michael W.; |
Journal
|
None |
823193 |
01-JAN-05 |
|
|
Traceable Pico-Meter Level Step Height Metrology |
|
Orji, Ndubuisi George; Dixson, Ronald G; Fu, Joseph N; Vorburger, Theodore V; |
Journal
|
None |
822142 |
01-DEC-04 |
|
|
Reference Metrology Using a Next Generation CD-AFM |
|
Dixson, Ronald G; Guerry, Angela ; |
Proceedings
|
None |
822152 |
24-MAY-04 |
|
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Interim Report on Single Crystal Critical Dimension Reference Materials (SCCDRM) |
|
Dixson, Ronald G; Cresswell, Michael W.; Allen, Richard A; Guthrie, William F; Park, Brandon ; Murabito, Christine E; Martinez, Joaquin V; |
Proceedings
|
None |
822245 |
01-JAN-04 |
|
|
Critical Dimension Calibration Standards for ULSI Metrology |
|
Allen, Richard A; Cresswell, Michael W.; Murabito, Christine E; Dixson, Ronald G; Bogardus, E. Hal ; |
Proceedings
|
None |
31314 |
30-SEP-03 |
|
|
Critical Dimension Calibration Standards for ULSI Metrology |
|
Bogardus, H ;Allen, Robert ; Cresswell, Michael W.; Murabito, Christine E; Dixson, Ronald G; |
Proceedings
|
None |
822397 |
01-SEP-03 |
|
|
Toward Traceability for At-line AFM Dimensional Metrology |
|
Bennett, Marylyn H.;Guerry, Angela ;Dixson, Ronald G; Postek, Michael T; Vorburger, Theodore V; |
Proceedings
|
None |
821740 |
01-JUL-03 |
|
|
Implementation of a Reference Measurement System Using CD-AFM |
|
Dixson, Ronald G; Vorburger, Theodore V; Guerry, Angela ;Bennett, Marylyn H.;Bunday, B ; |
Proceedings
|
None |
821967 |
01-MAY-03 |
|
|
Electron Beam Metrology of 193 nm Resists at Ultra Low Voltage |
|
Sullivan, N. ;Dixson, Ronald G; Bunday, B ;Mastovich, M ;Knutruda, P ;Fabre, P ;Brandoma, R ; |
Proceedings
|
None |
821976 |
01-MAY-03 |
|
|
Toward Traceability for At Line AFM Dimensional Metrology |
|
Dixson, Ronald G; Guerry, Angela ;Bennett, Marylyn H.;Vorburger, Theodore V; Postek, Michael T; |
Journal
|
None |
823148 |
01-JAN-02 |
|
|
Characterizing CDSEM Metrology of 193 nm Resists at Ultra Low Voltage |
|
Sullivan, N. ;Mastovich, M ;Dixson, Ronald G; Knutruda, P ;Bunday, B ;Febrea, P ;Brandoma, R ; |
Proceedings
|
None |
821957 |
01-JAN-02 |
|
|
Manufacturing of Prostheses |
|
Davies, Matthew A. ; Dixson, Ronald G; |
NIST Interagency/Internal Report (NISTIR)
|
None |
821858 |
01-SEP-01 |
|
|
Silicon Single Atom Steps as AFM Height Standards |
|
Dixson, Ronald G; Orji, Ndubuisi George; Fu, Joseph N; Tsai, V W. ; Williams, E. C. ;Vorburger, Theodore V; Edwards, H ;Cook, D ;West, P ;Nyffenegger, R ; |
Proceedings
|
None |
821579 |
01-AUG-01 |
|
|
Atomic Level Surface Metrology |
|
Vorburger, Theodore V; Dixson, Ronald G; Song, Jun-Feng ; Renegar, Thomas B; Fu, Joseph N; Orji, Ndubuisi George; Tsai, V W. ; Williams, E. C. ;Edwards, H ;Cook, D ;West, P ;Nyffenegger, R ; |
Proceedings
|
None |
823146 |
01-JAN-01 |
|
|
Linewidth Intercomparison on a Polysilicon Sample |
|
Villarrubia, John S; Vladar, Andras E.; Postek, Michael T; Dixson, Ronald G; |
Other
|
None |
821574 |
01-NOV-00 |
|
|
Accurate Dimensional Metrology With Atomic Force Microscopy |
|
Dixson, Ronald G; Koning, R ; Fu, Joseph N; Vorburger, Theodore V; Renegar, Thomas B; |
Proceedings
|
None |
820959 |
01-JUN-00 |
|
|
Interferometric Calibration of a Capacitance Displacement Sensor Over Short Displacement Ranges |
|
Koning, R ; Dixson, Ronald G; Fu, Joseph N; Peng, G S;Vorburger, Theodore V; |
Proceedings
|
None |
820964 |
01-JAN-00 |
|
|
The Role of Periodic Interferometer Errors in the Calibration of Capacitance Displacement Sensors for Nanometrology Applications |
|
Koning, R ; Dixson, Ronald G; Fu, Joseph N; Vorburger, Theodore V; |
Journal
|
None |
820965 |
01-JAN-00 |
|
|
Final Report: 1998-1999 NIST/SEMATECH Project on Intercomparison of Linewidth Measurement Methods |
|
Villarrubia, John S; Dixson, Ronald G; Jones, Samuel N; Lowney, J R; Postek, Michael T; |
Other
|
None |
820988 |
01-JAN-00 |
|
|
Step Height Metrology for Data Storage Applications |
|
Koning, R ; Dixson, Ronald G; Fu, Joseph N; Renegar, Thomas B; Vorburger, Theodore V; Tsai, V W. ; Postek, Michael T; |
Proceedings
|
None |
823118 |
01-NOV-99 |
|
|
Step-height Metrology for Data Storage Applications |
|
Koning, R ; Dixson, Ronald G; Fu, Joseph N; Renegar, Thomas B; Vorburger, Theodore V; Tsai, V W. ; Postek, Michael T; |
Proceedings
|
None |
820931 |
01-NOV-99 |
|
|
Intercomparison of SEM, AFM, and Electrical Linewidths |
|
Villarrubia, John S; Dixson, Ronald G; Jones, Samuel N; Lowney, J R; Postek, Michael T; Allen, Richard A; Cresswell, Michael W.; |
Proceedings
|
None |
820954 |
01-JUN-99 |
|
|
Dimensional Metrology with the NIST Calibrated Atomic Force Microscope |
|
Dixson, Ronald G; Koning, R ; Tsai, V W. ; Fu, Joseph N; Vorburger, Theodore V; |
Proceedings
|
None |
820926 |
01-JUN-99 |
|
|
Algorithms for Calculating Single-Atom Step Heights |
|
Fu, Joseph N; Tsai, V W. ; Koning, R ; Dixson, Ronald G; Vorburger, Theodore V; |
Journal
|
None |
820930 |
01-JAN-99 |
|
|
Improving Pitch and Step Height Measurements Using the Calibrated Atomic Force Microscope |
|
Koning, R ; Dixson, Ronald G; Fu, Joseph N; Tsai, V W. ; |
Proceedings
|
None |
823080 |
01-NOV-98 |
|
|
Measurement of Pitch and Width Samples with the NIST Calibrated Atomic Force Microscope |
|
Dixson, Ronald G; Koning, R ; Vorburger, Theodore V; Fu, Joseph N; Tsai, V W. ; |
Proceedings
|
None |
820889 |
01-JUN-98 |
|
|
Measurements of Pitch, Height, and Width Artifacts with the NIST Calibrated Atomic Force Microscope |
|
Dixson, Ronald G; Tsai, V W. ; Vorburger, Theodore V; Williams, Edwin R; Wang, X ;Fu, Joseph N; Koning, R ; |
Proceedings
|
None |
820838 |
01-JAN-98 |
|
|
Improving Step Height and Pitch Measurements Using the Calibrated Atomic Force Microscope |
|
Koning, R ; Dixson, Ronald G; Fu, Joseph N; Tsai, V W. ; Vorburger, Theodore V; |
Proceedings
|
None |
820898 |
01-JAN-98 |
|
|
Performing Measurements of Surface Structures With the Calibrated Atomic Force Microscope |
|
Koning, R ; Dixson, Ronald G; Fu, Joseph N; Tsai, V W. ; Vorburger, Theodore V; |
Web
|
None |
823087 |
01-JAN-98 |
|
|
The Study of Silicon Stepped Surfaces as Atomic Force Microscope Calibration Standards With a Calibrated AFM at NIST |
|
Tsai, V W. ; Vorburger, Theodore V; Dixson, Ronald G; Fu, Joseph N; Koning, R ; Silver, Richard M; Williams, E. C. ; |
Proceedings
|
None |
823099 |
01-JAN-98 |
|
|
Conformal Oxides on Si Surfaces |
|
Tsai, V W. ; Wang, S ;Williams, E. C. ;Schneir, J ; Dixson, Ronald G; |
Journal
|
None |
822524 |
15-SEP-97 |
|
|
Pitch and Step Height Measurements Using NIST |
|
Koning, R ; Dixson, Ronald G; Fu, Joseph N; Tsai, V W. ; Vorburger, Theodore V; Williams, Edwin R; Wang, X ; |
Proceedings
|
None |
820847 |
01-JAN-97 |
|
|
Benchmarking the Length Measurement Capabilities of the National Institute of Standards and Technology |
|
Silver, Richard M; Land, J ;Stone, Jack A; Dixson, Ronald G; Faust, Bryon S; Potzick, James Edward; Postek, Michael T; al, et ; |
NIST Interagency/Internal Report (NISTIR)
|
None |
820872 |
01-JAN-97 |
|
|
Finish and Figure Metrology for Soft X-ray Optics |
|
Vorburger, Theodore V; Evans, Christopher J. ; Tsai, V W. ; Fu, Joseph N; Williams, E. C. ;Dixson, Ronald G; Sullivan, P ; McWaid, T. ; |
Proceedings
|
None |
901981 |
01-JAN-97 |
|
|
Toward Accurate Linewidth Metrology Using Atomic Force Microscopy and Tip Characterization |
|
Dixson, Ronald G; Schneir, J ; Mcwaid, T ;Sullivan, N. ;Tsai, V W. ; Zaidi, S ;Brueck, S ; |
Proceedings
|
None |
820788 |
01-MAY-96 |
|
|
Measurement of a CD and Sidewall Angle Artifact with Two Dimensional CD AFM Metrology |
|
Dixson, Ronald G; Sullivan, N. ;Schneir, J ; Mcwaid, T ;Tsai, V W. ; Prochazka, J ;Young, M. ; |
Proceedings
|
None |
820789 |
01-MAY-96 |
|
|
Height Calibration of Atomic Force Microscopes Using Silicon Atomic Step Artifacts |
|
Tsai, V W. ; Vorburger, Theodore V; Sullivan, P ; Dixson, Ronald G; Silver, Richard M; Williams, Edwin R; Schneir, J ; |
Proceedings
|
None |
820827 |
01-JAN-96 |
|
|
Progress Towards Accurate Metrology Using Atomic Force Microscopy |
|
Mcwaid, T ;Schneir, J ; Villarrubia, John S; Dixson, Ronald G; Tsai, V W. ; |
Book
|
None |
820798 |
01-JAN-96 |
|
|
Toward Accurate Measurements of Pitch, Height, and Width Artifacts with the NIST Calibrated AFM |
|
Dixson, Ronald G; Vorburger, Theodore V; Sullivan, P ; Tsai, V W. ; Mcwaid, T ; |
Proceedings
|
None |
820790 |
01-JAN-96 |
|
|
Progress on Accurate Metrology of Pitch, Height, Roughness, and Width Artifacts Using an Atomic Force Microscope |
|
Schneir, J ; Mcwaid, T ;Dixson, Ronald G; Tsai, V W. ; Villarrubia, John S; Williams, Edwin R; Fu, E ; |
Proceedings
|
None |
820763 |
01-MAY-95 |
|
|
Increasing the Value of Atomic Force Microscopy Process Metrology Using a High-Accuracy Scanner, Tip Characterization, and Morphological Image Analysis |
|
Schneir, J ; Villarrubia, John S; Mcwaid, T ;Tsai, V W. ; Dixson, Ronald G; |
Journal
|
None |
820816 |
01-JAN-95 |
|
|
In Situ Tip Characterization for AFM and Application to Linewidth Metrology |
|
Dixson, Ronald G; Schneir, J ; Mcwaid, T ;Vorburger, Theodore V; |
Proceedings
|
None |
901972 |
01-JAN-94 |
|
|
