THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL

ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION

FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED.



***This solicitation is being issued using Simplified Acquisition Procedures.***



***This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular (FAC) 2005-26.***



*** The associated North American Industrial Classification System (NAICS) code for this procurement is 334516 with a small business size standard of 500 employees. This acquisition is a 100% small business set-aside. In accordance with the Non-Manufacturer Rule, to qualify under a small business set-aside, the distributor and the manufacturer must qualify as a Small Business under the NAICS code identified above. ***





*** The National Institute of Standards and Technology is seeking to purchase One (1) Wet Chemical Processing Bench. ***



Background:



NIST’s Center for Nanoscale Science and Technology requires a wet chemical bench to add additional processing capabilities to the clean room facility at NIST’s Gaithersburg, Maryland campus. The addition of this chemical bench will help to further expand the current processing capabilities made available to users of the facility and enhance the overall research mission by allowing the development of potentially unique processing steps in the areas of photomask and nano-fabrication. The required bench shall be designed for use in a research and development clean room.



***All interested Contractors may provide a quote for the following:



Line Item 0001: Quantity One (1) Wet Chemical Processing Bench, which shall meet or exceed the following minimum specifications:



1. The bench shall be approximately 72 inches in length (+/- 6 inches) and shall not exceed 38 inches front to back. The deck height shall be a minimum of 36 inches from the floor and shall not exceed 38 inches. The bench shall be able to be retrofitted to accommodate a fourth bath if purchased later (see option item 0002).



2. The bench shall be provided with three heated baths capable of operating up to 90 degrees Celsius for extended periods of time.



a. One heated bath shall be designed for use with chemistries such as Cyantek Nano-Strip (mixture of sulfuric acid and hydrogen peroxide),



b. A second heated bath shall be designed for chemistries such as Cyantek CA-40 (sodium hydroxide with surfactant) or chemistries such as Cyantek CR-7S (mixture of ceric ammonium nitrate and perchloric acid),



c. A third heated bath shall be designed for use with chemistries such Microchem 1165 resist stripper (n-methyl pyrrolidione).



3. Each bath shall be at least 7 inches in width, 7 inches in length, and 8 inches in depth.



4. Each bath shall be designed with individually programmable heating capability with independent temperature readouts



5. Each bath shall have agitation capability.



6. Each bath shall be designed and provided with a mechanical drain to facilitate capture of waste material.



7. The bench shall be provided with two programmable DI-water quick dump rinsers (QDRs). Each QDR shall be at least 7 inches in width, 7 inches in length and 8 inches in depth and have adjustable flow capability in cascade rinse mode.



8. The bench shall be provided with an automated glove rinse well.



9. The bench shall be provided with two DI-water spray guns and two nitrogen blow-off guns with associated regulators each made of Teflon or equivalent material (chemically inert material that will not affect water or nitrogen).



10. The bench shall be provided with a utility sink with dedicated drain. The utility sink shall be provided with a DI-water gooseneck with needle valve operator.



11. The bench shall have clear shields at each end of the unit as well as above the work surface. The clear shield shall be at least 0.25 inches thick and resistant to acids and caustics.



12. The bench shall be supplied with covers for all processing baths.



13. The wet bench shall be fully exhausted and capable of stand alone operation in a class 100 clean room facility.



14. All materials used in construction of the wet bench shall have a Fire Propagation Index (FPI) value at or below 6.0 and a Smoke Development Index (SDI) of 0.4 or less when tested in accordance with Material Standards code FM 4910. In addition, the bench shall be designed and built to meet fire protection code NFPA 318.



15. The wet bench shall have a provision for controlling of exhaust air along the leading front edge of the unit and along the rear deck of the unit. The unit shall have an integral damper assembly to allow independent balancing of the front and rear exhaust flows.



16. The bench shall be provided with a photohelic style pressure gauge to monitor exhaust performance. The gauge shall be interlocked with the main electrical service power to the unit so that in the event of a low exhaust situation, all power to the wet tool will be removed.



17. The bench shall be designed with a fully exhausted leak tight secondary containment plenum beneath the work deck. The secondary sump shall be drained thru a 2" FNPT connection and welded leak tight.



18. The bench unit must be supplied with four corner leveling and casters to allow for ease of installation.



19. The bench shall be designed with provisions to accept house CDA, nitrogen, and vacuum connections at the rear panel facing the work area.



20. The bench shall have an internal electrical distribution system with a single outside connection point wired to a main circuit breaker prior to distribution within the unit. All control power shall be 24V dc.



21. The bench shall be equipped with a single main panel power on switch and a single main panel EMO button.



22. The bench shall be designed with acid/base resistant drain lines. In addition, all water lines supplied with benches shall be compatible with 18 M-Ohm DI-water.



23. The bench shall have liquid level sensors for each chemical bath as well as a minimum of two built-in timers with audible alarms.



OPTION LINE ITEMS: The following items are option line items. The Contractor shall provide pricing for these items. Prices quoted shall be effective for a period of one year from the date of award. Award of option line items is at the sole discretion of the Government in accordance with 52.217-7.



Option Line Item 0002: Quantity One (1) Fourth Heated Bath, which shall meet or exceed the following minimum specifications:



1. Fourth heated bath designed for use with chemistries such as Cyantek CA-40 (sodium hydroxide with surfactant) or chemistries such as Cyantek CR-7S (mixture of ceric ammonium nitrate and perchloric acid).



2. The bath shall be at least 7 inches in width, 7 inches in length, and 8 inches in depth.



3. The bath shall be designed with individually programmable heating capability with independent temperature readout.



4. The bath shall have agitation capability.



5. The bath shall be designed and provided with a mechanical drain to facilitate capture of waste material.



Quality Assurance Requirements:



1. No first articles shall be accepted for this procurement.



2. The benches shall be inspected at the seller’s site prior to shipment to ensure that all technical requirements of this specification have been met. NIST has the right to have a representative present during inspection activities. The seller shall notify NIST at least 30 days before conducting inspection. Inspection activities shall be documented and provided to NIST prior to shipment of the system.



3. It is the seller’s responsibility to meet all applicable US electrical and associated safety and health code requirements relative to the described equipment. The seller shall provide documentation/certification that the system meets or exceeds these codes or standards.



4. The seller is responsible for all packing and shipping provisions to ensure that the system arrives at NIST in an undamaged, working condition. The seller shall inform NIST of shipping plans two weeks before actual shipment.



5. The system shall be provided with two copies of all needed schematics, installation requirements and instructions, and operating and maintenance manuals. All documentation shall be provided in English.



6. The seller shall provide qualified personnel to perform and/or oversee all system installation and start-up activities necessary to ensure the system is fully functional upon completion. In addition, the seller shall provide personnel to provide comprehensive training for at least 5 NIST employees necessary to operate the system to its full capabilities as stated in the technical portion of the specification.



7. Final acceptance of the system shall be based on testing of the system to the technical requirements of the specification after completion of installation at NIST. This will include, but is not limited to all gases, electrical, exhaust, laminar flow, filtration, control interlocks, DI-water and vacuum services.



Warranty and Service Requirements:



1. A one-year warranty shall commence upon full acceptance of the system by NIST. During the warranty period, at least two service visits shall be provided by the seller for routine preventative maintenance. During the warranty period, the seller's service personnel and any required replacement parts shall arrive at the installation site within three working days of notification by NIST that the equipment is inoperative and requires emergency service.



2. Service and maintenance shall be available from factory-trained service engineers and to help ensure maximum safety for such activities, an established service network shall be in place.



Delivery terms shall be FOB Destination. FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver line item 0001 (and 0002, if purchased) to NIST, Building 301, Shipping and Receiving, Gaithersburg, MD 20899-1640.



Award shall be made to the quoter whose quote offers the best value to the Government, technical capability, past performance & price will be considered. The Government will evaluate information based on the following evaluation criteria: 1) Technical Capability factor "Meeting or Exceeding the Minimum Specifications," 2) Past Performance and 3) Price.



Technical capability and past performance, when combined, shall be approximately equal importance to price. If Technical Capability and Past Performance are equivalent, price shall be the determining factor.



Technical Capability:



Evaluation of Technical Capability will be based on the information provided in the quotation. Quoters shall include the manufacturer or brand name, make and model of the products, manufacturer sales literature or other product literature which addresses all salient characteristics, and clearly documents that the offered product meets or exceeds the minimum specifications stated above.



Past Performance and Past Experience:



Past Performance and Past Experience will be evaluated to determine the overall quality of the product & service provided and the Contractors history of meeting delivery schedules for prior deliverables.



Evaluation of Past Performance and Past Experience shall be based on the references provided and/or the quoters recent and relevant procurement history with NIST or its affiliates. All Contractors shall be able to document their ability to provide the described Wet Chemical Processing Bench by providing a list of at least three (3) references to whom the same or similar equipment has been provided. The Contractor must include the references name, contact person, and contact information in the quotation.





*** The full text of a FAR provision or clause may be accessed electronically at http://acquisition.gov/comp/far/index.html. ***



*** The following provisions apply to this acquisition: 52.212-1 Instructions to Offerors-Commercial Items; 52.212-3 Offerors Representations and Certifications- Commercial Items. ***



*** Offerors must complete annual representations and certifications on-line at http://orca.bpn.gov in accordance with FAR 52.212-3 Offerors Representations and Certifications- Commercial Items. If paragraph (j) of the provision is applicable, a written submission is required.



******The following clauses apply to this acquisition:

1. 52.211-6 Brand Name or Equal;

2. 52.212-4 Contract Terms and Conditions—Commercial Items;

3. 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders—Commercial Items including subparagraphs:

a. 52.219-6 Notice of Total Small Business Set-Aside

b. 52.222-3 Convict Labor

c. 52.222-19 Child Labor – Cooperation With Authorities And Remedies

d. 52.222-21 Prohibition of Segregated Facilities

e. 52.222-26 Equal Opportunity

f. 52.222-36 Affirmative Action for Workers with Disabilities

g. 52.222-50 Combating Trafficking in Persons

h. 52.225-3 Buy American Act- Free Trade Agreement – Israeli Trade Act

i. 52.225-13 Restriction on Certain Foreign Purchases, and

j. 52.232-33 Payment by Electronic Funds Transfer-Central Contractor Registration.



Department of Commerce Agency-Level Protest Procedures Level above the Contracting Officer is also incorporated. It can be downloaded at www.nist.gov/admin/od/contract/agency.htm. ***



***All quoters shall submit the following: 1) An original and one (1) copy of a quotation which addresses Line Item 0001 and Option Line Item 0002; 2) An original and one (1) copy of the technical description and/or product literature; 3) Description of commercial warranty; 4) An original and one (1) copy of the most recent published price list(s); 5) A list of three (3) references which includes the contact’s name, phone number, and e-mail; 6) Country of Origin information for each line item.***



***All quotes shall be sent to the National Institute of Standards and Technology, Acquisition Management Division, Attn: Paula Wilkison, Building 301, Room B175, 100 Bureau Drive, Stop 1640, Gaithersburg, MD 20899-1640. ***



This is an Open-Market Combined Synopsis/Solicitation for equipment as defined herein. The Government intends to award a Purchase Order as a result of this Combined Synopsis/Solicitation that will include the terms and conditions that are set forth herein. In order to facilitate the award process, ALL quotes shall include a statement regarding the terms and conditions herein as follows:



The offeror shall state “The terms and conditions in the solicitation are acceptable to be included in the award document without modification, deletion, or addition.”



OR



The offeror shall state “The terms and conditions in the solicitation are acceptable to be included in the award document with the exception, deletion, or addition of the following:



Offeror shall list exception(s) and rationale for the exception(s)



Please note that this procurement is not being conducted under the GSA Federal Supply Schedule (FSS) program or another Government-Wide Area Contract (GWAC). If an offeror submits a quotation based upon an FSS or GWAC contract, the Government will accept the quoted price. However, the terms and conditions stated herein will be included in any resultant Purchase Order, not the terms and conditions of the offeror’s FSS or GWAC contract, and the statement required above shall be included in the quotation.



***Submission shall be received not later than 3:00 p.m. local time on July 18, 2008 at the National Institute of Standards & Technology, Acquisition Management Division, 100 Bureau Drive, Building 301, Room B175, Mail Stop 1640, Gaithersburg, MD 20899-1640, Attention: Paula Wilkison. Because of heightened security, FedEx, UPS, or similar delivery methods are the preferred method of delivery of quotes. If quotes are hand delivered, delivery shall be made on the actual due date through Gate A, and a 48 hour (excluding weekends and holidays) prior notice shall be made to the Contracts Office at 301-975-4959. NIST is not responsible for late delivery due to the added security measures. In addition, offerors/quoters who do not provide 24-hour notification in order to coordinate entrance to the NIST campus shall assume the risk of not being able to deliver offers/quotes on time. The Government is not responsible for the amount of time required to clear unannounced visitors, visitors without proper identification and without complete information that would allow delivery (i.e. point of contact, telephone POC, Building, room number, etc.). If 24-hour notification was not provided, it is suggested your company representative or your courier service arrive at NIST at least 90 minutes prior to the closing time in order to process entry to the campus through the visitor center and complete delivery. Notice shall include the company name, name of the individual making the delivery, and the country of citizenship of the individual. For non-U.S. citizens, the following additional information will be required: title, employer/sponsor, and address. Please ensure that the individual making the delivery brings photo identification, or they will be denied access to the facility.



Any questions or concerns regarding this solicitation should be forwarded in writing via e-mail to the Contract Specialist (Paula Wilkison) @ paula.wilkison@nist.gov. FAXED QUOTES WILL NOT BE ACCEPTED. HOWEVER, EMAILED QUOTES WILL BE ACCEPTED. ***

The purpose of this modification is to add an Option Line Item to the solicitation.

OPTION LINE ITEMS: The following item is an option line item. The Contractor shall provide pricing for this item. Prices quoted shall be effective for a period of one year from the date of award. Award of option line items is at the sole discretion of the Government in accordance with 52.217-7. The Government will evaluate offers for award purposes by including only the price for the basic requirement; i.e., options will not be included in the evaluation for award purposes.

Option Line Item 0003: Quantity One (1) Installation of Wet Chemical Processing Bench at NIST, Gaithersburg, Maryland.

The Contractor shall provide installation for the Wet Chemical Processing Bench, per the Wet Bench Utility Installation Specifications (attached). Installation shall also include uncrating/unpackaging of all equipment, set-up and hook-up of all equipment, system verification, and system check for manufacturing defects and any damage during shipment. The Contractor shall provide a thorough demonstration of all equipment functions. This must include a demonstration of all salient characteristics herein.

All other terms and conditions of the solicitation remain unchanged.

The purpose of the amendment is to clarify how option prices will be evaulated.



The price of Option Line Item 0002 (Fourth Heated Bath) will be evaluated for award purposes.



The price of Option Line Item 0003 (Installation) will not be evaluated for award purposes.



All other terms and conditions remain unchanged. The purpose of this amendment is to add pictures of the area in which the wet bench is to be installed.



All other terms and conditions remain unchanged. The purpose of this modification is to change the specifications and option items for the Wet Chemical Processing Bench.



The specifications and option items in the original solicitation document are hereby replaced by the specifications and option items in the attached document dated July 25, 2008.



The reponse date is extended until 3:00 p.m. on Tuesday, July 29.