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E.O. Lawrence Berkeley National Laboratory
APPLICATIONS OF TECHNOLOGY:
- Ion Implantation: Hardening of materials such as automotive
parts or medical tools, semiconductor pacification, plasma processing.
- High Energy Accelerators: Mass spectrometer cyclotrinos, medical
proton therapy, neutral, positive or negative beam applications,
fusion.
- Neutron Tubes: Wellbore logging applications.
- Waste minimization: Chemical and radioactive waste treatment.
ADVANTAGES:
- RF source better than filament or other conventional plasma
generators. RF power coupling produces cleaner plasmas and ion
implants. RF power sources available commercially and easily controlled.
No need for expensive electronics.
- Twice as efficient as uncoated RF sources, since it is electrically
non-conductive.
- Water-cooled. Longer life times. Avoids radiative heat problems.
Also protects RF source power source and seal.
- Even implant of ions on irregularly-shaped objects. Opens the
door to plasma processing of complex objects impossible before
now such as engine blocks.
- Clean operating. Will not sputter. Does not contaminate plasma.
Result: purer ion implants.
- Works with a wide variety of gases, including O2 and corrosive
BF3.
- Narrow implant profile, important in oxygen implant applications.
- Works both in pulsed and continuous modes.
- Non-reactive. Will last at least ten times as long as filament
sources. Makes all applications much more cost-effective.
- Sturdy. Can withstand physical shock, transport, and space launch.
- Porcelain coating technique works on antennas from centimeters
to a meter in diameter.
- Demonstrated RF power coupling > 25kW (cw) and > 50kW
(pulsed)
ABSTRACT: Long-lasting, versatile RF antenna for clean plasma
generation. Ka-Ngo Leung and colleagues at Berkeley National Laboratory have designed a porcelain-coated antenna
improves ion and plasma sources used to generate positive, negative
or neutral particle beams. Used for ion implantation it allows the
processing of large, irregularly-shaped objects, such as whole engine
blocks, difficult or impossible to do before now. It works with
corrosive gases, has a much longer life time than conventional sources,
and does not require expensive electronics. It does not suffer from
sputtering, assuring cleaner plasmas and purer ion implants.
The RF antenna has excellent thermal coupling between its hard
porcelain enamel coating and water-cooled metal-tube substrate,
allowing it to operate at high temperatures for longer periods of
time. Since the antenna is cooled it will not cause radiative heating
problems in ion implant applications. This cooling also protects
the antenna chamber mount. The hard coating prevents unwanted sputtering,
ensuring a life span at least ten times as long as standard ion
sources. Its non-reactive properties also make it ideal for ion
implantation applications with corrosive gases and for continuous
operation applications. Due to its sturdy construction it can survive
mechanical impacts, heat stress and a hot plasma environment.
STATUS: U.S. Patent #5,587,226. Available
for licensing in specific fields of use
REFERENCE NUMBER: IB-918
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CONTACT:
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Technology
Transfer Department
E.O. Lawrence Berkeley National Laboratory
MS 90-1070
Berkeley, CA 94720
(510) 486-6467 FAX: (510) 486-6457
TTD@lbl.gov |
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