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Chemical Vapor-Deposited (CVD) Diamond Films for Electronic Applications

Diamond films have a variety of useful applications as electron emitters in devices such as magnetrons, electron multipliers, displays, and sensors. Secondary electron emission is the effect in which electrons are emitted from the near surface of a material because of energetic incident electrons. The total secondary yield coefficient, which is the ratio of the number of secondary electrons to the number of incident electrons, generally ranges from 2 to 4 for most materials used in such applications. It was discovered recently at the NASA Lewis Research Center that chemical vapor-deposited (CVD) diamond films have very high secondary electron yields, particularly when they are coated with thin layers of CsI. For CsI-coated diamond films, the total secondary yield coefficient can exceed 60.

In addition, diamond films exhibit field emission at fields orders of magnitude lower than for existing state-of-the-art emitters. Present state-of-the-art microfabricated field emitters generally require applied fields above 5x10^7 V/cm. Research on field emission from CVD diamond and high-pressure, high-temperature diamond has shown that field emission can be obtained at fields as low as 2x10^4 V/cm. It has also been shown that thin layers of metals, such as gold, and of alkali halides, such as CsI, can significantly increase field emission and stability. Emitters with nanometer-scale lithography will be able to obtain high-current densities with voltages on the order of only 10 to 15 V.

Bibliography

Mearini, G.T., et al.: Fabrication of an Electron Multiplier Utilizing Diamond Films. Thin Sol. Fil., vol. 253, 1994, pp. 151-156.

Mearini, G.T.; Krainsky, I.L.; and Dayton, J.A., Jr.,: Investigation of Diamond Films for Electronic Devices. Surf. and Interface Anal., vol. 21, 1994, pp. 138-143.

Mearini, G.T., et al.: Stable Secondary Electron Emission Observations From Chemical Vapor Deposited Diamond. Appl. Phys. Lett., vol. 65, no. 21, Nov. 1994, pp. 2702-2704.

Mearini, G.T., et al.: Stable Secondary Electron Emission From Chemical Vapor Deposited Diamond Films Coated With Alkali-Halides. Appl. Phys. Lett., vol. 66, no. 2, Jan. 1995, pp. 242- 244.

Lamouri, A., et al.: Proc. of the International Vacuum Microelectronic Conference, Portland, OR, 1995.

Lewis contact: Dr. Isay L. Krainsky, (216) 433-3509
Headquarters program office: OSAT

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