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Media Count:
N/A
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Date:
1994
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Author:
C. C. Tsai W. D. Nelson D. E. Schechter L. M. Thompson A. L. Glover
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In a microwave electron cyclotron resonance plasma source, reactive plasmas of oxygen and its mixtures of argon have been used for evaluating plasma cleaning technologies. Small aluminum samples (0.95 x 1.9 cm) were coated with thin films ((le) 20 (micro) ...
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Report Number:
CONF-9408174-4
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Contract Number:
AC05-84OR21400
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Project Number:
N/A
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Grant Number:
N/A
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Task Number:
N/A
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NTIS announcement issue:
9615
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"N/A" indicates no data is available for this field.
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