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Media Count:
N/A
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Date:
1993
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Author:
C. C. Tsai H. H. Haselton W. D. Nelson D. E. Schechter L. M. Thompson
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In a microwave electron cyclotron resonance (ECR) plasma source, reactive plasmas of oxygen and its mixture with argon are used for plasma-cleaning experiments. Aluminum test samples (0.95 (times) 1.9 cm) were coated with thin films ((le) 20 (mu)m in thic ...
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Report Number:
Y/DV-1298 CONF-9311110-1
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Contract Number:
AC05-84OS21400
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Project Number:
N/A
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Grant Number:
N/A
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Task Number:
N/A
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NTIS announcement issue:
9411
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"N/A" indicates no data is available for this field.
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