	US 7,373,047 B2
	Embedded electrode integrated optical devices and methods of fabrication
David W. Nippa, Dublin, Ohio (US); Steven M. Risser, Reynoldsburg, Ohio (US); Richard W. Ridgway, Westerville, Ohio (US); Tim L. Shortridge, Pataskala, Ohio (US); Vincent McGinniss, Sunbury, Ohio (US); and Kevin Spahr, Worthington, Ohio (US)
Assigned to Optimer Photonics, Inc., Columbus, Ohio (US)
Filed on Nov. 21, 2003, as Appl. No. 10/719,892.
Claims priority of provisional application 60/428160, filed on Nov. 21, 2002.
Prior Publication US 2004/0131303 A1, Jul. 08, 2004
Int. Cl. G02F 1/025 (2006.01); G02F 1/313 (2006.01)

U.S. Cl. 385—40 [385/2; 385/8]

59 Claims

1. A method of fabricating an integrated optical device, said method comprising:

providing a support wafer defining an electrode support surface;

forming an electrode pattern over said electrode support surface of said support wafer;

forming a non-polymeric buffer layer on at least a portion of said electrode pattern and over at least a portion of said support wafer;

forming a non-polymeric, silica-based waveguide core material layer over said non-polymeric buffer layer;

removing portions of said core material layer to define a non-polymeric waveguide core and a pair of cladding containment regions extending along opposite sides of said non-polymeric waveguide core in a direction substantially parallel to a longitudinal dimension of said non-polymeric waveguide core, wherein each of said pair of cladding containment regions is defined between distinct pairs of opposing side walls and the waveguide core is disposed between the cladding containment regions such that each side of the waveguide core forms a side wall of a cladding containment region; and

positioning a polymeric cladding material within at least a substantial portion of said pair of cladding containment regions so as to place said polymeric cladding material in optical communication with said non-polymeric waveguide core such that said non-polymeric buffer layer, said polymeric cladding material, and said non-polymeric waveguide core define an optically-clad waveguide core, wherein at least one of said cladding material and said waveguide core are configured such that a control signal applied to said electrode pattern alters a transmission characteristic of an optical signal propagating along said waveguide core.