National Renewable Energy Laboratory

Technology Transfer

Optical Processing Furnace with Quartz Muffle and Diffuser Plate

U.S. Patent 5,577,157

Technology Description

An optical furnace for annealing a process wafer comprising a source of optical energy, a quartz muffle having a door to hold the wafer for processing, and a quartz diffuser plate to diffuse the light impinging on the quartz muffle; a feedback system with a light sensor located in the wall of the muffle is also provided for controlling the source of optical energy.

Inventors

Bhushan L. Sopori

Interested in this Technology?

• See the full U.S. Patent for this technology.
• NREL is looking for an organization to develop and commercialize this innovative technology. Interested organizations may consider developing/commercializing this technology through a license agreement, Cooperative Research Agreement, or Work for Others agreement. Please contact Richard Bolin at (303) 275-3028 for licensing, CRADA, and Work for Others opportunities.