Micro- and Nanotechnologies

Scientific Staff

Facility/Equipment

Research Areas

   Advanced Fabrication
      Advances in the Microfabrication
        of Materials for Laser Targets
      Custom Engineering
      Laser Pantography
      Microscale Liquid Droplet Placement
      Moldable Plastics
      Nano Laser Ablation
      Nanorod Particles
      Plasma Etching

   Chem/Bio Devices
      A Single-Cell Arraying and
        Measurement Platform
      Nanorod-Based Multiplex Bioassay
      Retinal Prosthesis
      Sample Preparation Techniques
        for Biological Assays

   Electronic & Photonic Devices
      Microring Resonators
      Optical CDMA
      Photonic Integrated Circuits
        for National Needs
      Pillar-Structured Thermal
        Neutron Detector
      Radoptic Radiation Detector
      Temporal Imaging

   MEMS & Physical Devices
      Optical Processor for Microfiber
        Sensors
      MEMS-Based Adaptive-Optics
        Vision System
      Micro Power Supplies
      Stress, Deflection, and Strain Sensors

   Modeling
      Computational Photonics
      Fluidic Modeling

Related Links:

Nanoscience at LLNL

Key advancements over the last three decades in micro- and nanotechnology have enabled revolutionary growth in microelectronics and sensors at the commercial scale. The Center for Micro- & Nano-Technology (CMNT) at LLNL has been a leader in fueling the commercial growth of these technologies while simultaneously customizing these same technologies for unique, noncommercial applications that are mission-specific to LLNL and DOE. The combination of world-class R&D talent and unique fabrication facilities at the CMNT have enabled highly innovative, full-system solutions to technology needs in the areas of Stockpile Monitoring and Stewardship, Homeland Security, and Intelligence.

CMNT scientists and engineers focus on device development, system integration, and platform technology that bring together researchers and technologies from diverse disciplines such as engineering, chemistry, biology, physics, material science, and computer science. This multidisciplinary collaboration at the leading edge of R&D has led to novel capabilities including highly integrated bio-microsystems (for sensors & medical devices), photonic microsystems (for high-speed signal and data acquisition), microelectromechanical systems (for advanced sensing & actuation), and scalable power systems (for powering micro- and mesoscale devices). Recent developments in nanotechnology at the CMNT have enabled manipulation and control of material at the nanometer scale and are resulting in novel fabrication methods and devices that offer orders-of-magnitude improvement in performance, as well as new functionalities.

Absolute Conditioner for Fabry-Perot Microsensors Read more...

Advanced Microelectrodes for Chemical and Biological Detection (pdf) Read more...

Advanced Polymerase Chain Reaction Module Read more...

Biological Sample Preparation Infrastructure Read more...

Block Copolymer Nanolithography Read more...

Bridging the Length and Time Scales from Atomistics to the Microscale Read more...

Characterization and Integration of New Patterned Nanostructure Deposition Cluster Tool (pdf) Read more...

Characterization of Deep Reactive Ion Etching of Dielectric Materials Read more...

Chip Slapper Detonator Processing for Rapid Prototyping and Hydrodynamic Properties Read more...

Colocation of MEMS and Electronics Read more...

Compact High-Intensity Crystal-Driven Neutron Source Read more...

Compact Tunable Optical Sensors Read more...

Custom Microinstrumentation for Sensing Systems (pdf) Read more...

Evaluation of Electrets for MEMS/NEMS (pdf) Read more...

Extending Lasers to Universal Gates for Photonic FPGAs Read more...

Flow Programmed Mesoscale Assembly of Nanoengineered Materials and Net Shape Components Read more...

Flow-Through Pyrosequencing in a Microfluidic Device Read more...

Gray-Scale Lithography for Sloped-Surface 3-D MEMS Structures Read more...

"HE-Less" Detonator Modeling Read more...

High-Density Plasma Source Read more...

High-Precision Multimode Ultrasonic Liquid Applicator (pdf) Read more...

Implementing Nano-Imprint Capability Read more...

Investigation of Hybridization Times for DNA Microarrays Read more...

Laser Pantography Read more...

Microfabricated Silicon Nib for Low-Cost, Multiplexed Micro-Coating Read more...

Microfluidic Systems for Solution-Array-Based Bioassays (pdf) Read more...

Microfluidic Test Station (pdf) Read more...

Modular Front-End Sample Preparation Microdevice for Integrated Hydrophobic Protein Separation System (pdf) Read more...

Optoelectronic Device Fabrication Read more...

Pillar Neutron Detector Fabrication Read more...

Precision Sample Control and Extraction Component Read more...

Rapid Defense Against the Next-Generation Biothreat Read more...

Scale-Up of the Slip Process (pdf) Read more...

Silicon-Deposition Process Implementation (pdf) Read more...

Silicon Nitride Furnace Installation Read more...

Simulation Capability for Nanoscale Manufacturing Using Block Copolymers Read more...

Single-Molecule Assay of DNA Integrity Read more...

Structure and Properties of Nanoporous Materials Read more...

Thermal-Fluidic System for Manipulation of Biomolecules and Viruses Read more...

Transport Behavior and Conversion Efficiency in Pillar Structured Neutron Detectors Read more...

Tunable Optical Cavities for Gas Sensor Read more...

Validation of 3-D Acoustic Modeling of Commercial Codes for Microfluidic Systems Read more...

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September 25, 2008