| US 7,375,322 B2 | ||
| Cantilever holder and scanning probe microscope | ||
| Itaru Kitajima, Chiba (Japan); and Masatsugu Shigeno, Chiba (Japan) | ||
| Assigned to SII NanoTechnology Inc., (Japan) | ||
| Filed on Mar. 14, 2006, as Appl. No. 11/374,841. | ||
| Claims priority of application No. 2005-072262 (JP), filed on Mar. 15, 2005; and application No. 2006-012859 (JP), filed on Jan. 20, 2006. | ||
| Prior Publication US 2006/0219916 A1, Oct. 05, 2006 | ||
| Int. Cl. G01N 13/16 (2006.01); G01B 5/28 (2006.01) | ||
| U.S. Cl. 250—306 [250/309; 73/105] | 10 Claims |
| 1. A cantilever holder which is a cantilever holder for attachably and detachably fixing a cantilever which includes a stylus
at a front end thereof and a base end side of which is supported by a main body portion in a flat plate shape in a single-supported
state, the cantilever holder comprises:
a base member having a mounting portion for mounting the main body portion in a state of being positioned at a predetermined
position;
a holding member made to be able to be brought into contact with at least a surface of the main body portion in a state of
mounting the main body portion on the mounting portion and extended in a direction substantially orthogonal to a longitudinal
direction of the cantilever; and
pressing means for pressing both ends of the holding member to the base member by a predetermined pressure, fixing the main
body portion to the mounting portion by way of the holding member and capable of separating the holding member from the surface
of the main body portion by releasing the both ends of the holding member from being pressed;
wherein the holing member is formed by a resin species material.
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