A. |
Plasma Reactor Chamber per R15967 REV D |
1 ea. |
|
B. |
Pumpout Weldment per R16139 REV B |
1 ea. |
|
C. |
Non-Movable Upper Electrode Assembly |
1 ea. |
R15966 REV A Reactor Top Flange |
1 ea. |
R15393 REV B Showerhead |
1 ea. |
R15965-101 REV A Indium Gasket |
1 ea. |
R15965-102 REV A Indium Gasket |
1 ea. |
R15965-104 REV A Indium Gasket |
1 ea. |
R15491-101 REV C Guard Ring |
1 ea. |
R15448-101 REV C Bearing Ring |
1 ea. |
R17442-101 REV F Upper Electrode Weldment |
1 ea. |
15447-102 REV E Alumina Insulator required (If Alumina not available
- Teflon has been substituted for this item) |
|
|
D. |
Movable Upper Electrode Assembly |
1 ea. |
910919-3 REV B Top Flange/Bellows/Conveyor Ring Assembly |
1 ea. |
R15448-102 REV C Bearing Ring |
1 ea. |
R16135 REV B Retaining Ring |
1 ea. |
R16137 REV B Swivel Housing |
1 ea. |
R16187 REV B Guide Rod |
2 ea. |
R17442-102 REV F Electrode Weldment |
1 ea. |
R17483 REV B Guide Pin |
2 ea. |
R17484 REV B Angle Bracket |
2 ea. |
Item #91 Steel Handle (CL-1-RH, Carr Lane Mfg.) |
2 ea. |
R15491-102 REV C Guard Ring |
1 ea. |
**R15393 REV B Showerhead |
1 ea. |
Item #83 Quick Release Pin (92385A036, McMaster Carr Mfg.) |
2 ea. |
**R15965-101 Indium Gasket REV A |
1 ea. |
**R15965-102 Indium Gasket REV A |
1 ea. |
**R15965-104 Indium Gasket REV A |
1 ea. |
B-675-12, 12 point bolt sets |
1 ea. |
R15447-104 REV E Alumina Insulator required (If Alumina not available
- Teflon has been substituted for this item) |
|
|
E. |
Lower Electrode Assembly |
1 ea. |
R15492-101 REV A Electrode |
1 ea. |
R15491-101 REV C Guard Ring |
1 ea. |
R15448-101 REV C Bearing Ring |
1 ea. |
R15965-103 REV A Indium Gasket |
1 ea. |
R17443 REV F Lower Electrode Weldment |
1 ea. |
R15547-101 REV E Alumina Insulator (If Alumina not available - Teflon
has been substituted for this item) |
1 ea. |
R15547-103 REV E Alumina Insulator (If Alumina not available - Teflon
has been substituted for this item - for RGA port only) |
1 ea. |
9551-00632-4 #6-32 x 3.0 Long SHC Screws (for GRA electrode Only) |
6 ea. |
|
F. |
Base Weldment per R16071 REV D |
1 ea. |
|
G. |
Lower Pumping Manifold Assembly per 940413-6 |
1 ea |
911004-2-02 REV C Manifold Sub Assembly |
2 ea. |
911004-2-03 REV A Manifold Sub Assembly (tee) |
1 ea. |
931213-1 REV B Manifold Sub Assembly (full nipple) |
2 ea. |
931213-2 REV A Manifold Sub Assembly |
2 ea. |
|
H. |
Viewports (Glass. Quartz is also available.) |
|
ZV-600 - 6" |
2 (max) |
ZV-400 - 4" |
2 (max) |
ZV-150 - 2 3/4" |
4 (max) |
|
I. |
Misc. Assembly Hardware |
1 ea. |
R25238 REV A Pan Head Screws |
24 ea. |
R16138 REV A Modified Pan Head Screws |
18 ea. |
9551-01032-W Item #80 #10 Flat Washer |
21 ea. |
9551-00632-WS Item #84 #6 Flat Washers |
36 ea. |
9551-00632-13 Item #82 #6-32 x .625 Long SHC Screws |
21 ea. |
2-151 O-Ring, Viton |
3 ea. |
2-254 O-Ring, Viton |
3 ea. |
B-275T-12, 12 point bolt sets |
3 pkg. |
B-275-12, 12 point bolt sets |
1 pkg. |
B-600T-12, 12 point bolt sets |
1 pkg. |
B-600-12 bolt sets |
1 pkg. |
B-800T-12 |
2 pkg. |
B-675T bolt sets |
1 pkg. |
B-1325T bolt sets |
2 pkg. |
G-1325 individual copper gaskets |
2 ea. |
G-600 copper gaskets |
1 pkg. |
G-275 copper gaskets |
3 pkg. |
|
J. |
Optional Pumpout Configuration |
|
R20501 REV B ???Reducer Cross (Replaces R17345???) |
1 ea. |
Item #87, 3T-150 Tee |
1 ea. |
Item #116, 275-1/4SWAG |
1 ea. |
2FC-150-2 Flex Coupling |
1 ea. |
Item #110, GVP-1502-CF Pneumatic 1.5 inch ID Gate Valve |
2 ea. |
Item #112, GVP-4002-CF Pneumatic 1.0 inch ID Gate Valve |
1 ea. |
Item #88, Exhaust Throttle Valve required (Mfg. by MKS Instruments) |
|
|
K. |
Inductive Coil Assembly per 940201-1-8 REV A |
1 ea. |
940201-20 Coil Tube/Top Plate Assembly |
1 ea. |
940201-2 Skirt Port Ring |
1 ea. |
940201-4 Spacer Ring |
1 ea. |
940201-5 Electrode Skirt |
1 ea. |
940201-6 Modified 13.25" Flange |
1 ea. |
940201-7 REV A Coil |
1 ea. |
940201-8 Quartz Window |
1 ea. |
2-247 O-rings for window |
2 ea. |
2-263 O-rings for spacer |
2 ea. |
9551-00440-4 #4-40 x .75" SHC screws |
6 ea. |
931214-1 REV A Teflon insulator |
1 ea. |
9551-01025-9 1/4-20 x 1.25 Hex Head Screws |
6 ea. |
9551-00025-W 1/4" Washers |
6 ea. |
|
L. |
Electropolish on all stainless steel sub-assemblies |
1 ea. |