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DOI 10.1116/1.1465447
Title Magnetic and structural properties of Fe, Ni, and Mn-implanted SiC
Creator/Author Theodoropoulou, N. ; Hebard, A.F. ; Chu, S.N.G. ; Overberg, M.E. ; Abernathy, C.R. ; Pearton, S.J. ; Wilson, R.G. ; Zavada, J.M. ; Park, Y.D. [Department of Physics, University of Florida, Gainesville, Florida 32611 (United States) ; Agere Systems, Murray Hill, New Jersey 07974 (United States) ; Department of Materials Science and Engineering, University of Florida, Gainesville, Florida 32611 (United States) ; Consultant, Stevenson Ranch, California 93181 (United States) ; U.S. Army Research Office, Research Triangle Park, North Carolina 27709 (United States) ; Department of Physics, Seoul National University, Seoul (Korea, Republic of)]
Publication Date2002 May 01
OSTI IdentifierOSTI ID: 20396241
Other Number(s)Journal ID: ISSN 0734-2101; JVTAD6; TRN: US03B8674072368
Resource TypeJournal Article
Resource RelationJournal: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films; Journal Volume: 20; Journal Issue: 3; Other Information: DOI: 10.1116/1.1465447; (c) 2002 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); PBD: May 2002
Subject75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ANNEALING; CRYSTAL DEFECTS; CURIE POINT; ION IMPLANTATION; IRON; MAGNETIC PROPERTIES; MANGANESE; NICKEL; P-TYPE CONDUCTORS; SILICON CARBIDES; TEMPERATURE RANGE 1000-4000 K; TRANSMISSION ELECTRON MICROSCOPY; X-RAY DIFFRACTION
Description/Abstract Direct implantation of Fe, Ni or Mn at doses of 3-5x10{sup 16} cm{sup -2} into p-type 6H-SiC substrates was carried out at a sample temperature of {approx}350 deg. C. Subsequent annealing was performed at 700-1000 deg. C for 5 mins. Residual damage in the form of end-of-range defects and dislocation loops in the region from the surface to a depth of {approx}0.20 {mu}m were examined by transmission electron microscopy. To the sensitivity of both x-ray diffraction and selected area diffraction pattern analysis, no secondary phases could be detected. Signatures of ferromagnetism were observed in all the highest dose samples, with apparent Curie temperatures of 50 K (Ni), 250 K (Mn), and 270 K (Fe)
Country of PublicationUnited States
LanguageEnglish
FormatSize: page(s) 579-582
System Entry Date2004 Jul 13

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