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Index of Semiconductor Process Gases
Note: In the tables RED is used for properties obtained from estimation methods. Other colors are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
| Ammonia | NH3 | Nitrogen Trifluoride | NF3 |
| Argon | Ar | Nitrogen | N2 |
| Allene | C3H4 | Oxygen | O2 |
| Arsenic Trifluoride | AsF3 | Phosgene | COCl2 |
| Arsine | AsH3 | Phosphourous Trifluoride | PF3 |
| Trimethyl Arsine | As(CH3)3 | Phosphorous Pentafluoride | PF5 |
| Diborane | B2H6 | Phosphine | PH3 |
| Pentaborane | B5H9 | Sulfur Dioxide | SO2 |
| Boron Trichloride | BCl3 | Stibine | SbH3 |
| Bromine | Br2 | Silane | SiH4 |
| Carbon Dioxide | CO2 | Disilane | Si2H6 |
| Carbon Monoxide | CO | Silicon Tetrachloride | SiCl4 |
| Carbon Tetrafluoride | CF4 | Silicon Teterafluoride | SiF4 |
| Chlorine | Cl2 | Sulfur Hexafluoride | SF6 |
| Chlorine Trifluoride | ClF3 | Titanium Tetrachloride | TiCl4 |
| Ethylene Oxide | C2H4O | Tungsten Hexafluoride | WF6 |
| Helium | He | Uranium Hexafluoride | UF6 |
| Hexafluroethane | C2F6 | Vinyl Bromide | C2H3Br |
| Hydrogen | H2 | Vinyl Fluoride | C2H3F |
| Hydrogen Bromide | HBr | Vinyl Chloride | C2H3Cl |
| Hydrogen Chloride | HCl | Trimethyl Gallium | Ga(CH3)3 |
| Hydrogen Fluoride | HF | Triethyl Gallium | Ga(C2H5)3 |
| Hydrogen Sulfide | H2S | Trimethyl Indium | In(C2H5)3 |
| Molybdenum Hexafluooride | MoF6 | ||
| Nitric Oxide | NO | ||
| Nitrous Oxide | N2O | ||
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Last modified:17 July 2006.
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