Title: Complex
MEMS device: Microshutter array system for space applications - art.
no. 655602
Author(s): Li, MJ (Li, Mary J.),
Adachi, T (Adachi, Tomoko),
Allen, C (Allen, Christine),
Babu, S (Babu, Sachi),
Bajikar, S (Bajikar, Sateesh),
Beamesderfer, M (Beamesderfer, Michael),
Bradley, R (Bradley, Ruth),
Denis, K (Denis, Kevin),
Costen, N (Costen, Nick),
Ewin, A (Ewin, Audrey),
Franz, D (Franz, Dave),
Hess, L (Hess, Larry),
Hu, R (Hu, Ron),
Jackson, K (Jackson, Kamili),
Jhabvala, M (Jhabvala, Murzy),
Kelly, D (Kelly, Dan),
King, T (King, Todd),
Kletetschka, G (Kletetschka, Gunther),
Kutyrev, A (Kutyrev, Alexander),
Lynch, B (Lynch, Barney),
Miller, T (Miller, Timothy),
Moseley, H (Moseley, Harvey),
Mikula, V (Mikula, Vilem),
Mott, B (Mott, Brent),
Oh, L (Oh, Lance),
Pontius, J (Pontius, James),
Rapchun, D (Rapchun, Dave),
Ray, C (Ray, Chris),
Ray, K (Ray, Knute),
Schulte, E (Schulte, Eric),
Schwinger, S (Schwinger, Scott),
Shu, P (Shu, Peter),
Silverberg, R (Silverberg, Robert),
Smith, W (Smith, Wayne),
Snodgrass, S (Snodgrass, Steve),
Sohl, D (Sohl, David),
Sparr, L (Sparr, Leroy),
Steptoe-Jackson, R (Steptoe-Jackson,
Rosalind),
Veronica, V (Veronica, Valeriano),
Wang, L (Wang, Liqin),
Zheng, Y (Zheng, Yun (Tony)),
Zincke, C (Zincke, Chris)
Source: MICRO
(MEMS) AND NANOTECHNOLOGIES FOR DEFENSE AND SECURITY 6556: 55602-55602,
2007
Book Series: PROCEEDINGS
OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)
Editor(s): George
T, Cheng Z
Document Type: Article
Language: English
Conference
Information: Conference on Micro (MEMS) and
Nanotechnologies for Defense and Security
Orlando, FL, APR 10-12, 2007
Abstract: A
complex MEMS device, microshutter array system, is being developed at
NASA Goddard Space Flight Center for use as an aperture array for a
Near-Infrared Spectrometer (NirSpec). The instrument will be carried on
the James Webb Space Telescope (JWST), the next generation of space
telescope after Hubble Space Telescope retires. The microshutter arrays
(MSAs) are designed for the selective transmission of light with high
efficiency and high contrast. Arrays are close-packed silicon nitride
membranes with a pixel size close to 100x200 mu m. Individual shutters
are patterned with a torsion flexure permitting shutters to open 90
degrees with a minimized mechanical stress concentration. Light shields
are made on to each shutter for light leak leak prevention so to
enhance optical contrast. Shutters are actuated magnetically, latched
and addressed electrostatically. The shutter arrays are fabricated
using MEMS bulk-micromachining technologies and packaged using
single-sided indium flip-chip bonding technology. The MSA flight
concept consists of a mosaic of 2 x 2 format of four fully addressable
365 x 171 arrays placed in the JWST optical path at the focal plane.
Author Keywords: microshutter;
MEMS; RIE; DRIE; micro-optics; near infrared; space telescope; flip
chip bonding
KeyWords Plus: TELESCOPE
Addresses: Li
MJ (reprint author), NASA, Goddard Space Flight Ctr, Mountain View, CA
USA
NASA, Goddard Space Flight Ctr, Mountain View, CA USA
Publisher: SPIE-INT
SOC OPTICAL ENGINEERING, 1000 20TH ST, PO BOX 10, BELLINGHAM, WA
98227-0010 USA
IDS Number: BGK10
ISSN: 0277-786X
ISBN: 978-0-8194-6678-5
