Title - Computational Nanotechnology Publications
Process Modeling and Diagnostics
1. M. Meyyappan, "Modeling of a Pulsed-Power SF6 Plasma", Japanese Journal of Applied Physics, Vol. 36 (7B), pp. 4820-4823 (1997).
2. D. Hash and M. Meyyappan, "A Direct Simulation Monte Carlo Study of Flow Considerations in Plasma Reactor Development for 300 mm Processing", Journal of Electrochemical Society, Vol. 144 (11), pp. 3999-4004 (1997).
3. M. Meyyappan, "Characteristics of an Electron Cyclotron Resonance Plasma Source for the Production of Active Nitrogen Species in III-V Nitride Epitaxy", MRS Internet Journal on Nitride Semiconductor Research, Vol. 2, Article 46 (1997).
4. M. Meyyappan, "Modeling of GaN Hydride Vapor Phase Epitaxy", Journal of Vacuum Science and Technology A, Vol. 16, 2, pp. 685-688 (1998).
5. D.J. Economou, T.L. Panagopoulos, and M. Meyyappan, "Examining Scale-up and Computer Simulation in Tool Design for 300 mm Wafer Processing", Micro, pp. 101-114, July/August (1998).
6. J. Yang, P.L.G. Ventzek, Y. Sakai, H. Date, K. Kitamori, H. Tagashira, and M. Meyyappan, "Simulations of Step Responses of Electronegative Radiofrequency Capacitively Coupled Discharges", Journal of Applied Physics, Vol. 84 (4), pp. 1848 (1998).
7. D. Bose, T.R. Govindan, and M. Meyyappan, "A Self Consistent Simulation of an Inductively Coupled Plasma Reactor", IEEE Transactions on Plasma Science, Vol. 27 (1), pp. 54-55 (1999).
8. H. Hwang, T.R. Govindan, and M. Meyyappan, "Feature Profile Evolution Simulation Using Level Set Method", Journal of Electrochemical Society, Vol. 146 (5), pp. 1889-1894 (1999).
9. D. Bose, T.R. Govindan, and M. Meyyappan, "A Continuum Model for the Inductively Coupled Plasma Reactor", Journal of Electrochemical Society, Vol. 146 (7), pp. 2705-2711 (1999).
10. C.H. Chang and D. Bose, "Viscous Effects on Motion and Heating of Electrons in Inductively Coupled Plasma Reactors", IEEE Transactions on Plasma Science, Vol. 27 (5), pp. 1310-1316 (1999).
11. D. Bose, T.R. Govindan, and M. Meyyappan, "Ion Dynamics Model for Collisionless Radiofrequency Sheaths", Journal of Applied Physics, Vol. 87 (10), pp. 7176-7184, May 2000.
12. S. Panda and D.J. Economou, "Effect of Metastable Oxygen Molecules in High Density Power-Modulated Oxygen Discharges", Journal of Applied Physics, Vol. 87 (12), pp. 8323-8333, June 2000.
13. D. B. Hash, T. Mihopoulos, T.R. Govindan, and M. Meyyappan, "Characterization of Showerhead Performance at Low Pressure," Journal of Vacuum Science and Technology B, Vol. 18 (6), pp. 2808-2813 (2000).
14. D. Bose, T.R. Govindan, and M. Meyyappan, "Semianalytical Ion Current Model for Radiofrequency Driven Collisionless Sheaths", Journal of Applied Physics, Vol. 89, pp. 5932-5938, June 2001.
15. D. B. Hash, D. Bose, M.V.V.S. Rao, B.A. Cruden, M. Meyyappan, and S.P. Sharma,"Impact of Gas Heating in Inductively Coupled Plasmas", Journal of Applied Physics, Vol. 90 (5), pp. 2148-2157, September 2001.
16. J.S. Kim, M.V.V.S. Rao, M.A. Cappelli, S.P. Sharma, and M. Meyyappan, "Mass Spectrometric and Langmuir Probe Measurements in Inductively Coupled Plasmas in Ar, CHF3/Ar and CHF3/Ar/O2 Mixtures, Plasma Sources Science and Technology, Vol. 10, pp. 191-204 (2001).
17. D. Bose, D. Hash, T.R. Govindan, and M. Meyyappan, "Modeling of Inductively Coupled Plasma Processing Reactors", Journal of Physics D Applied Physics D, Vol. 34 (18), pp. 2742-2747, September 2001.
18. W. Fu, R. Venkat and M. Meyyappan, Theoretical Study of GaN MBE Growth using ECR Nitrogen Plasma, Journal of Vacuum Science and Technology B, Vol. 19 (5), pp. 1803-1807, September/October, 2001.
19. M.V.V.S. Rao, S.P. Sharma, B.A. Cruden, and M. Meyyappan, "Langmuir Probe and Mass Spectrometric Measurements in Inductively Coupled CF4 Plasmas, Plasma Sources Science and Technology," Vol. 11, pp. 69-76, 2002.
20. B. A. Cruden, M.V.V.S. Rao, S.P. Sharma, and M. Meyyappan, "Fourier Transform Infrared Spectroscopy of CF4 Plasmas in the GEC Reference Cell," Plasma Sources Science and Technology, Vol. 11, pp. 77-90, 2002.
21. B.A. Cruden, M.V.V.S. Rao, S.P. Sharma, and M. Meyyappan, "Detection of Chamber Conditioning by CF4 Plasmas in an Inductively Coupled Plasma Reactor," Journal of Vacuum Science and Technology B, Vol. 20 (1), pp. 353-363, Jan./Feb. 2002.
22. B.A. Cruden, M.V.V.S. Rao, S.P. Sharma, M. Meyyappan, "Optical Pathlength Control in Plasma Absorption Measurements, Review of Scientific Instruments", Vol. 73, p. 2578-2582 (2002).
23. B.A. Cruden, M.V.V.S. Rao, S.P. Sharma, M. Meyyappan, "Neutral Gas Temperature Estimates in an Inductively Coupled CF4 Plasma by Fitting Diatomic Emission Spectra," Journal of Applied Physics, Vol. 91, pp. 8955-8964 (2002).
24. B.A. Cruden, "On the Proposed Second Law Paradox in a Non-Zero Floating Potential," Physics of Plasmas, Vol. 8, p. 5323 (2001).
25. M. V. V. S. Rao, M. Meyyappan, and S. P. Sharma, "Langmuir Probe Measurements in inductively coupled plasmas in CF4/Ar mixtures", J. Electrochemical Society, 149, pp. 487-491 (2002).
26. B.A. Cruden, M.V.V.S. Rao, S.P. Sharma, M. Meyyappan, "Neutral Gas Temperature Estimate in CF4/O2/Ar Inductively Coupled Plasmas", Applied Physics Letters, 81, pp. 990-992 (2002).
27. M. V. V. S. Rao, S. P. Sharma, and M. Meyyappan, “Ion Fluxes and Ion Energy Distributions in Inductively Coupled Plasmas in CF4/Ar Mixtures", Plasma Sources Science and Technology (in press).
28. B.A. Cruden, M.V.V.S. Rao, S.P. Sharma, M. Meyyappan, "Fourier Transform Infrared and Optical Emission Spectroscopy of Inductively Coupled CF4/O2/Ar Mixtures", Journal of Applied Physics, Vol. 93, p. 5053 (2003).
29. D. Bose, T.R. Govindan, M. Meyyappan, "A Coupled Plasma and Sheath Model for High Density Reactors", IEEE Transactions on Plasma Science , Vol. 30, 2, pp 653-659, (2002).
30. M.V.V.S. Rao, S.P. Sharma, and M. Meyyappan, "Mass Spectrometric Measurements in Inductively Coupled CF4/Ar Plasmas," Plasma Sources, Science and Technology, Vol. 11, p. 397 (2002).
31. D. Bose, M.V.V.S. Rao, T.R. Govindan, M. Meyyappan, "Uncertainty and Sensitivity Analysis of Gas Phase Chemistry in a CHF3 Plasma Reactor," Plasma Sources Science and Technology, Vol. 12, p. 225 (2003).
32. R. Mogul, A.A. Bol'shakov, S.L. Chan, R.M. Stevens, B.N. Khare, M. Meyyappan, J.D. Trent, "Impact of Low-Temperature Plasmas on Deinococcus radiodurans and Biomolecules" Biotechnol. Prog., Vol.19, .3, pp. 776-783 (2003).
33. G.L. Gutsev, M.D. Mochena, P. Jena, C.W. Bauschlicher, and H. Partridge III, "Periodic Table of 3D-Metal Dimers and Their Ions," Journal of Chemical Physics, Vol. 121, 14, pp. 6785-6797 (2004).
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