+ Visit NASA.gov + Contact NASA   + Home Select Search Field * All Report - Patent Number Abstract *Accession Number *NASA Center *Author NameDocument IDKeywordsPublication Date *Title * Find Results With All of the words At least one of the words Enter Search Term  within returned results    Search Tips: Use only the fields with * to search NIX collection. Enclose terms in double quotation marks (") to search for exact phrases, ie: "space shuttle". NOTE: Commas and dashes are removed from search term by search engine. Select Reset Search button to start a new search. See Help for more tips. + NASA Center + Publication Year + Subject + Availability Options + Item/Media Type Selected Navigations: Author > Bose, Deepak [x] Sort results by: NASA Center | Date Added to NTRS | Publication Year There are a total of 16 record(s) matching your query. Sorted by: Date Added To NTRS in Descending order 1 2 Next  Etching in Chlorine Discharges Using an Integrated Feature Evolution-Plasma Model Author(s): Hwang, Helen H.; Bose, Deepak; Govindan, T. R.; Meyyappan, M. Abstract: Etching of semiconductor materials is reliant on plasma properties. Quantities such as ion and neutral fluxes, both in magnitude and in direction, are often determined by reactor geometry (height, radius, position of the ... NASA Center: Ames Research Center Publication Year: 2001 Added to NTRS: 2008-06-02 Document ID: 20020011677 A Semianalytical Ion Current Model for Radio Frequency Driven Collisionless Sheaths Author(s): Bose, Deepak; Govindan, T. R.; Meyyappan, M. Abstract: We propose a semianalytical ion dynamics model for a collisionless radio frequency biased sheath. The model uses bulk plasma conditions and electrode boundary condition to predict ion impact energy distribution and ... NASA Center: Ames Research Center Publication Year: 2001 Added to NTRS: 2008-06-02 Document ID: 20010046070 A Risk-Based Approach for Aerothermal/TPS Analysis and Testing Author(s): Wright, Michael J.; Grinstead, Jay H.; Bose, Deepak Abstract: The current status of aerothermal and thermal protection system modeling for civilian entry missions is reviewed. For most such missions, the accuracy of our simulations is limited not by the tools and processes currently ... NASA Center: Ames Research Center Publication Year: 2007 Added to NTRS: 2008-06-02 Document ID: 20080018722 Simulation of Etching in Chlorine Discharges Using an Integrated Feature Evolution-Plasma Model Author(s): Hwang, Helen H.; Bose, Deepak; Govindan, T. R.; Meyyappan, M. Abstract: To better utilize its vast collection of heterogeneous resources that are geographically distributed across the United States, NASA is constructing a computational grid called the Information Power Grid (IPG). This paper ... NASA Center: Ames Research Center Publication Year: 2002 Added to NTRS: 2008-06-02 Document ID: 20020091861 Simulation of the dc Plasma in Carbon Nanotube Growth Author(s): Hash, David; Bose, Deepak; Govindan, T. R.; Meyyappan, M. Abstract: A model for the dc plasma used in carbon nanotube growth is presented, and one-dimensional simulations of an acetylene/ammonia/argon system are performed. The effect of dc bias is illustrated by examining electron ... NASA Center: Ames Research Center Publication Year: 2003 Added to NTRS: 2008-06-02 Document ID: 20030017838 Hybrid MD-Nernst Planck Model of Alpha-hemolysin Conductance Properties Author(s): Cozmuta, Ioana; O'Keefer, James T.; Bose, Deepak; Stolc, Viktor Abstract: Motivated by experiments in which an applied electric field translocates polynucleotides through an alpha-hemolysin protein channel causing ionic current transient blockade, a hybrid simulation model is proposed to predict ... NASA Center: Ames Research Center Publication Year: 2006 Added to NTRS: 2006-09-29 Document ID: 20060021485 Prediction of the Aerothermodynamic Environment of the Huygens Probe Author(s): Hollis, Brian R.; Striepe, Scott A.; Wright, Michael J.; Bose, Deepak; Sutton, Kenneth; Takashima, Naruhisa Abstract: An investigation of the aerothermodynamic environment of the Huygens entry probe has been conducted. A Monte Carlo simulation of the trajectory of the probe during entry into Titan's atmosphere was performed to identify a ... NASA Center: Ames Research Center, Langley Research Center Publication Year: 2005 Added to NTRS: 2005-08-25 Document ID: 20050182949; Report Number: AIAA Paper 2005-4816 A Coupled Plasma Dynamics and Gas Flow Model for Semiconductor Processing Author(s): Bose, Deepak; Govindan, T. R.; Meyyappan, M. Abstract: A continuum modeling approach by self-consistently coupling plasma dynamics and gas flow will be presented for the analysis of high density plasma reactors. Experimental data shows that gas flow distribution affects the etch ... NASA Center: Ames Research Center Publication Year: 1998 Added to NTRS: 2004-11-03 Document ID: 20020060760 A Coupled Plasma-Sheath Model for High Density Sources Author(s): Bose, Deepak; Govindan, T. R.; Meyyappan, M. Abstract: High density, low pressure plasmas are used for etching and deposition in microelectronics fabrication processes. The process characteristics are strongly determined by the ion energy distribution (IED) and the ion flux ... NASA Center: Ames Research Center Publication Year: 2000 Added to NTRS: 2004-11-03 Document ID: 20010048414 A Monte Carlo Sensitivity Analysis of CF2 and CF Radical Densities in a c-C4F8 Plasma Author(s): Bose, Deepak; Rauf, Shahid; Hash, D. B.; Govindan, T. R.; Meyyappan, M. Abstract: A Monte Carlo sensitivity analysis is used to build a plasma chemistry model for octacyclofluorobutane (c-C4F8) which is commonly used in dielectric etch. Experimental data are used both quantitatively and quantitatively to ... NASA Center: Ames Research Center Publication Year: 2004 Added to NTRS: 2004-11-03 Document ID: 20040068147 1 2 Next  + Back to Top + Sponsored by the NASA Scientific and Technical    Information Program + 2004 Vision for Space Exploration + Freedom of Information Act + NASA Web Privacy Policy and Important Notices + NASA Disclaimers, Copyright Notice,    and Terms and Conditions of Use NASA Official: Calvin Mackey Page Curator: NASA Center for AeroSpace Information (help@sti.nasa.gov) Last Updated: July 5, 2007