LLNL Engineering Center for Micro- and Nanotechnologies

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About Engineering

Engineering Technology Centers Center for Micro- and Nanotechnologies Center for Nondestructive Characterization Center for Precision Engineering Engineering's Micro- and Nanotechnologies Area				The mission of the Center for Microtechnology and Nanotechnology is to invent, develop, and apply microscale and nanoscale technologies to support LLNL missions in Stockpile Stewardship, Homeland Security, Nonproliferation, biomedical research, and other programs. The research and capabilities of the Center cover materials, devices, instruments, and systems that require microfabricated components, including microelectromechanical systems (MEMS), electronics, photonics, micro- and nanostructures, and micro- and nanoactuators. Some examples are featured below. Microtechnologies and microdevices have never been an end in themselves at the Laboratory. Rather, they are problem solvers. As LLNL researchers search for solutions to mission-specific challenges, they often find that commercial products do not meet their needs. They turn to the experts at the Center for Microtechnology and Nanotechnology, whose creations are often what enable a Laboratory experiment or diagnostic tool to function successfully. Integrated microdevices are thus finding their way into increasing numbers of Laboratory projects. Today, microtechnology has become nanotechnology, and more features with more capabilities can be squeezed into a smaller area. For example, Livermore's engineers are supporting a Defense Advanced Research Projects Agency (DARPA) project to develop the BioFluidic Chip--essentially a clinical laboratory on a chip, small enough to be worn on an earlobe. The Center has the equipment and infrastructure needed for lithography, etching, diffusion, wafer bonding, and thin-film deposition and vacuum techniques. The facility houses 3500 square feet of Class 10—1000 clean rooms for micromachining, silicon microelectronics, III–V semiconductor optoelectronics, and guided-wave photonics. Other labs provide material characterization and device-testing capabilities, microscopic inspection, packaging, and electrical and optical testing of devices. The research the Center is pursuing on a broad front will also have growing significance to agencies outside the Laboratory and to industry. Micro- and nanosystems are a major frontier that is essential to the continued vitality of the Laboratory’s engineering capabilities. For more information, contact Center Director Anantha Krishnan.

		Publications
		Absolute Conditioner for Fabry-Perot Microsensors Read more... Advanced Microelectrodes for Chemical and Biological Detection (pdf) Read more... Advanced Polymerase Chain Reaction Module Read more... Biological Sample Preparation Infrastructure Read more... Block Copolymer Nanolithography Read more... Bridging the Length and Time Scales from Atomistics to the Microscale Read more... Characterization and Integration of New Patterned Nanostructure Deposition Cluster Tool (pdf) Read more... Characterization of Deep Reactive Ion Etching of Dielectric Materials Read more... Chip Slapper Detonator Processing for Rapid Prototyping and Hydrodynamic Properties Read more... Colocation of MEMS and Electronics Read more... Compact High-Intensity Crystal-Driven Neutron Source Read more... Compact Tunable Optical Sensors Read more... Custom Microinstrumentation for Sensing Systems (pdf) Read more... Evaluation of Electrets for MEMS/NEMS (pdf) Read more... Extending Lasers to Universal Gates for Photonic FPGAs Read more... Flow Programmed Mesoscale Assembly of Nanoengineered Materials and Net Shape Components Read more... Flow-Through Pyrosequencing in a Microfluidic Device Read more... Gray-Scale Lithography for Sloped-Surface 3-D MEMS Structures Read more... "HE-Less" Detonator Modeling Read more... High-Density Plasma Source Read more... High-Precision Multimode Ultrasonic Liquid Applicator (pdf) Read more... Implementing Nano-Imprint Capability Read more... Investigation of Hybridization Times for DNA Microarrays Read more... Laser Pantography Read more... Microfabricated Silicon Nib for Low-Cost, Multiplexed Micro-Coating Read more... Microfluidic Systems for Solution-Array-Based Bioassays (pdf) Read more... Microfluidic Test Station (pdf) Read more... Modular Front-End Sample Preparation Microdevice for Integrated Hydrophobic Protein Separation System (pdf) Read more... Optoelectronic Device Fabrication Read more... Pillar Neutron Detector Fabrication Read more... Precision Sample Control and Extraction Component Read more... Rapid Defense Against the Next-Generation Biothreat Read more... Scale-Up of the Slip Process (pdf) Read more... Silicon-Deposition Process Implementation (pdf) Read more... Silicon Nitride Furnace Installation Read more... Simulation Capability for Nanoscale Manufacturing Using Block Copolymers Read more... Single-Molecule Assay of DNA Integrity Read more... Structure and Properties of Nanoporous Materials Read more... Thermal-Fluidic System for Manipulation of Biomolecules and Viruses Read more... Transport Behavior and Conversion Efficiency in Pillar Structured Neutron Detectors Read more... Tunable Optical Cavities for Gas Sensor Read more... Validation of 3-D Acoustic Modeling of Commercial Codes for Microfluidic Systems Read more...

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