Energy Citations Database

Searched:  Author Contains ("Helot, M.") Sorted By:  Relevance, Descending Results:  1–1 of exactly 1 matches. (0.018 seconds) Sort Results By: Relevance Publication Date System Entry Date Resource/Doc Type Title Research Org Sponsoring Org OSTI Identifier Report Number(s) DOE Contract No Creator/Author(s) Digitize Docs Ascending Descending Return to Original Search Page Page 1 of 1     Show only (√) Items Clear all (√) Items Create Alert Refine Search Printer Friendly   Size Identifier Title Creator/Author (s) Pub Date Adopt-A-Doc   20776947 Plasma etching of HfO{sub 2} at elevated temperatures in chlorine-based chemistry Helot, M. ; Chevolleau, T. ; Vallier, L. ; et.al. 2006 Jan 15 - Top Return to Original Search Page Page 1 of 1