Daniel G. Stearns, Donald W. Sweeney, Paul B. Mirkarimi
Method for Fabricating Reticles for Extreme-Ultraviolet Lithography
without the Use of a Patterned Absorber
U.S. Patent 6,635,391 B2
October 21, 2003
Absorber material used in conventional extreme ultraviolet lithography
(EUVL) reticles is eliminated by introducing a direct modulation
in the complex-valued reflectance of a multilayer. A spatially
localized energy source, such as a focused electron or ion beam,
directly writes a reticle pattern onto the reflective multilayer
coating. Interdiffusion is activated within the film by an energy
source that causes the multilayer period to contract in the exposed
regions. The contraction is accurately determined by the energy
dose. A controllable variation in the phase and amplitude of the
reflected field in the reticle plane is produced by the spatial
modulation of the multilayer period. This method for patterning
an EUVL reticle has the advantages of avoiding the process steps
associated with depositing and patterning an absorber layer and
providing control of the phase and amplitude of the reflected field
with high spatial resolution.
Paul J. Weber, Steven R. Visuri, Matthew J. Everett, Luiz B.
Da Silva, Alwin H. Kolster
Liposuction Cannula Device and Method
U.S. Patent 6,638,238 B1
October 28, 2003
A liposuction apparatus and method having an optional sonic or
ultrasonic source with an axial lumen passage in which the shaft
can be made to reciprocate (oscillate) in a nonrectilinear fashion.
The apparatus may also contain the concomitant use of rectilinear
reciprocation motion in addition to ultrasonic motion or energy
along the shaft of the apparatus. The advantages of the liposuction
apparatus are as follows: nonrectilinear single shaft reciprocating
cannula; sonic or ultrasonic energy delivered to the distal tip;
rectilinear reciprocating cannula with ultrasonic energy along
a shaft from the handle; and any of the above reciprocating components
powered by excess unused vacuum capacity in the liposuction aspirator
(suction engine) apparatus. Three primary sources of energy are
applied to the cannula shaft: the oscillating surgeon’s arm
motion of approximately 1 to 2 hertz; the reciprocating motion
of about 100 hertz; and the optional concomitant motion delivered
by the ultrasonic energy of, for example, 25 kilohertz.
Alan F.
Jankowski, Jeffrey D. Morse
MEMS-Based Thin-Film Fuel Cells
U.S. Patent 6,638,654 B2
October 28, 2003
A microelectromechanical systems– (MEMS-) based thin-film
fuel cell for electrical power applications. The MEMS-based fuel
cell may be of a solid-oxide type, a solid-polymer type, or a proton-exchange-membrane
type. Each fuel cell basically consists of an anode and a cathode
separated by an electrolyte layer. In addition, catalyst layers
can separate the electrodes (cathode and anode) from the electrolyte.
Gas manifolds are used to transport the fuel and oxidant into each
cell and to provide a path for exhaust gases. The electrical current
generated from each cell is drawn away by an interconnect and support
structure integrated with the gas manifold. The fuel cells use
integrated resistive heaters for efficient heating of the materials.
By combining MEMS technology with thin-film deposition technology,
thin-film fuel cells with microflow channels and fully integrated
circuitry can be produced. These fuel cells will lower operating
temperatures of the electrical power application and will yield
an order-of-magnitude greater power density than currently known
fuel cells.
Gary F. Stone, James E. Trebes
Optic for an Endoscope and Borescope
Having High Resolution and Narrow Field of View
U.S. Patent 6,639,739
B1
October 28, 2003
An optic with optimized high spatial resolution, minimal nonlinear
magnification distortion, and limited chromatic focal shift or
aberrations. The optic located at the distal end of an endoscopic
inspection tool allows for a high-resolution, narrow-field-of-view
image for medical diagnostic applications as compared to conventional
optics for endoscopic instruments that provide a low-resolution,
wide-field-of-view image. The image coverage is over a narrow
(less than 20 degrees) field of view with low optical distortion
(less
than 5 percent pin cushion or barrel distortion). The optic is
also optimized for best color correction as well as to aid medical
diagnostics.
Andy J. Bayramian, Raymond J. Beach, Eric Honea,
James E. Murray, Stephen A. Payne
Compact Cladding-Pumped Planar Waveguide Amplifier and Fabrication
Method
U.S. Patent 6,640,040 B2
October 28, 2003
A low-cost, high-performance, cladding-pumped planar waveguide
amplifier and fabrication method for deployment in metro and
access networks. The waveguide amplifier has a compact monolithic
slab
architecture preferably formed by first sandwich-bonding an
erbium-doped core glass slab between two cladding glass slabs
to form a multilayer
planar construction, and then slicing the construction into
multiple unit constructions. Using lithographic techniques,
a silver stripe
is deposited and formed at a top or bottom surface of each
unit construction and over a cross section of the bonds. Heating
the
unit construction in an oven and applying an electrical field
ion-diffuses the silver stripe to increase the refractive indices
of the core
and cladding regions, with the diffusion region of the core
forming a single-mode waveguide and the silver diffusion cladding
region
forming a second, larger waveguide amenable to cladding pumping
with broad-area diodes.
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